发明申请
US20050264340A1 METHOD AND APPARATUS FOR REDUCING CHARGE INJECTION IN CONTROL OF MEMS ELECTROSTATIC ACTUATOR ARRAY
失效
减少MEMS静电致动器阵列控制电荷注入的方法与装置
- 专利标题： METHOD AND APPARATUS FOR REDUCING CHARGE INJECTION IN CONTROL OF MEMS ELECTROSTATIC ACTUATOR ARRAY
- 专利标题（中）： 减少MEMS静电致动器阵列控制电荷注入的方法与装置
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申请号： US10855359申请日： 2004-05-28
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公开(公告)号： US20050264340A1公开(公告)日： 2005-12-01
- 发明人: Eric Martin , Art Piehl , Adam Ghozeil
- 申请人： Eric Martin , Art Piehl , Adam Ghozeil
- 专利权人： HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.
- 当前专利权人： HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.
- 主分类号： G09G3/34
- IPC分类号： G09G3/34 ; H03B1/00 ; H03K17/30
摘要：
A control circuit for a MEMS (Micro-Electro-Mechanical System) has a semiconductor switch which has a source, a drain and a gate, which is associated with a selected one of spatially arranged fixed and movable plates of a variable capacitor, and is arranged to selectively connect the selected one of the fixed and movable plates with a voltage source. A charge injection control circuit is associated with the semiconductor switch and attenuates current injection into the selected one of the fixed and movable plates of the capacitor.
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