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发明申请
US20050264617A1 Electrostatic actuator formed by a semiconductor manufacturing process 有权
由半导体制造工艺形成的静电致动器

Electrostatic actuator formed by a semiconductor manufacturing process
摘要：
An electrostatic actuator has high-reliability and less variation in characteristics. An electrode (12a) is formed on a substrate (1), and a plurality of partition parts (50a) are formed on the electrode. A vibration plate (19) is formed on the partition parts (50a), and is deformable by an electrostatic force generated by a voltage applied to the electrode (12a) so that an air gap (14a) is formed between the partition parts (50a) by etching a part of a sacrifice layer (14) formed between the electrode (12a) and the vibration plate (19). The partition parts (50a) are formed of remaining parts of the sacrifice layer (14) after the etching.
摘要（中）：

静电致动器具有高可靠性和较小的特性变化。 在基板（1）上形成电极（12a），在电极上形成多个分隔部（50a）。 振动板（19）形成在分隔部分（50a）上，并且由施加到电极（12a）的电压产生的静电力变形，使得在隔板 通过蚀刻形成在电极（12a）和振动板（19）之间的牺牲层（14）的一部分，部分（50μm）。 在蚀刻之后，分隔部分（50a）由牺牲层（14）的剩余部分形成。

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