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公开(公告)号：US20180117915A1
公开(公告)日：2018-05-03
申请号：US15668839
申请日：2017-08-04
Applicant: Atsushi TAKEUCHI , Osamu MACHIDA , Akira SHIMOFUKU , Shuya ABE , Masahiro ISHIMORI , Takuma HIRABAYASHI
Inventor： Atsushi TAKEUCHI , Osamu MACHIDA , Akira SHIMOFUKU , Shuya ABE , Masahiro ISHIMORI , Takuma HIRABAYASHI
CPC classification number: B41J2/14233 , B41J2/1612 , B41J2/1629 , B41J2/1631 , B41J2/1645 , B41J2/1646 , H01L41/047 , H01L41/0805 , H01L41/0973 , H01L41/098 , H01L41/29 , H01L41/318
Abstract: An electromechanical transducer element includes a first electrode on a substrate, an electromechanical transducer film on the first electrode, and a second electrode on the electromechanical transducer film. The electromechanical transducer film includes a thin line pattern. The thin line pattern includes a plurality of thin lines that are spaced away from each other.
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2.发明授权Liquid discharge head, liquid supply cartridge, and liquid jet apparatus having electrostatic actuator formed by a semiconductor manufacturing process 有权液体排出头，液体供应盒和具有由半导体制造工艺形成的静电致动器的液体喷射装置公开(公告)号：US08052249B2
公开(公告)日：2011-11-08
申请号：US12174342
申请日：2008-07-16
Applicant: Manabu Nishimura , Takahiko Kuroda , Shuya Abe , Makoto Tanaka , Mitsugu Irinoda , Kenichiroh Hashimoto
Inventor： Manabu Nishimura , Takahiko Kuroda , Shuya Abe , Makoto Tanaka , Mitsugu Irinoda , Kenichiroh Hashimoto
CPC classification number: B41J2/1628 , B06B1/0292 , B41J2/14314 , B41J2/16 , B41J2/1623 , B41J2/1629 , B41J2/1639 , B41J2/1642 , B41J2/1645 , B41J2/1646 , B41J2002/14411
Abstract: An approach applying a semiconductor manufacturing process in the manufacturing of an electrostatic actuator, such as for a droplet discharging head, liquid supply cartridge, inkjet recording apparatus and/or liquid jet apparatus, is provided. Such electrostatic actuator has high-reliability and less variation in characteristics.
Abstract translation: 提供了一种在诸如液滴喷射头，液体供应盒，喷墨记录装置和/或液体喷射装置的静电致动器的制造中应用半导体制造工艺的方法。 这种静电致动器具有高可靠性和较小的特性变化。
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公开(公告)号：US20170306471A1
公开(公告)日：2017-10-26
申请号：US15491354
申请日：2017-04-19
Applicant: Shuya ABE , Osamu MACHIDA , Masahiro ISHIMORI , Takuma HIRABAYASHI
Inventor： Shuya ABE , Osamu MACHIDA , Masahiro ISHIMORI , Takuma HIRABAYASHI
Abstract: There is provided a method of producing an electromechanical transducer that includes a plurality of electromechanical transducer elements on a substrate. The method includes forming a plurality of individual electrodes corresponding to the plurality of electromechanical transducer elements on the substrate, forming an insulation film to cover the plurality of individual electrodes on the substrate, forming a conductive film on the insulation film, forming a plurality of openings to expose the plurality of individual electrodes in each of the insulation film and the conductive film, and forming a plurality of electromechanical transducer films on the plurality of individual electrodes exposed in the plurality of openings.
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公开(公告)号：US07416281B2
公开(公告)日：2008-08-26
申请号：US10521055
申请日：2003-08-05
Applicant: Manabu Nishimura , Takahiko Kuroda , Shuya Abe , Makoto Tanaka , Mitsugu Irinoda , Kenichiroh Hashimoto
Inventor： Manabu Nishimura , Takahiko Kuroda , Shuya Abe , Makoto Tanaka , Mitsugu Irinoda , Kenichiroh Hashimoto
CPC classification number: B41J2/1628 , B06B1/0292 , B41J2/14314 , B41J2/16 , B41J2/1623 , B41J2/1629 , B41J2/1639 , B41J2/1642 , B41J2/1645 , B41J2/1646 , B41J2002/14411
Abstract: An electrostatic actuator has high-reliability and less variation in characteristics. An electrode (12a) is formed on a substrate (1), and a plurality of partition parts (50a) are formed on the electrode. A vibration plate (19) is formed on the partition parts (50a), and is deformable by an electrostatic force generated by a voltage applied to the electrode (12a) so that an air gap (14a) is formed between the partition parts (50a) by etching a part of a sacrifice layer (14) formed between the electrode (12a) and the vibration plate (19). The partition parts (50a) are formed of remaining parts of the sacrifice layer (14) after the etching.
Abstract translation: 静电致动器具有高可靠性和较小的特性变化。 在基板（1）上形成电极（12a），在电极上形成多个分隔部（50a）。 振动板（19）形成在分隔部分（50a）上，并且由施加到电极（12a）的电压产生的静电力变形，使得在隔板 通过蚀刻形成在电极（12a）和振动板（19）之间的牺牲层（14）的一部分，部分（50μm）。 在蚀刻之后，分隔部分（50a）由牺牲层（14）的剩余部分形成。
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公开(公告)号：US06406133B1
公开(公告)日：2002-06-18
申请号：US09632047
申请日：2000-08-03
Applicant: Shuya Abe
Inventor： Shuya Abe
IPC: B41J206
CPC classification number: B41J2/14314 , B41J2202/03
Abstract: An electrostatic ink jet head includes nozzles, ink passages, a diaphragm that forms a part of the ink passages, individual electrodes that face the diaphragm. A driving voltage is applied between a common substrate formed on the diaphragm and the individual electrodes, thereby generating electrostatic force. The diaphragm is deformed by the electrostatic force. As a result, the ink in the ink passages are pressurized, so that ink droplets are discharged through the nozzles. Spacers are employed to form a gap between the diaphragm and each individual electrode. At least one of the spacers is made of the same material as the individual electrodes, so that the individual electrodes have high voltage resistance. Furthermore, voltage of both polarities can be used, and gap formation can be carried out with high precision through simpler production steps.
Abstract translation: 静电喷墨头包括喷嘴，油墨通道，形成油墨通道的一部分的隔膜，面对隔膜的单独电极。 驱动电压施加在形成在隔膜上的公共基板和各个电极之间，从而产生静电力。 隔膜通过静电力变形。 结果，油墨通道中的油墨被加压，使得墨滴通过喷嘴排出。 间隔器用于在隔膜和每个单独的电极之间形成间隙。 至少一个间隔件由与各个电极相同的材料制成，使得各个电极具有高耐电压性。 此外，可以使用两极的电压，并且可以通过简单的制造步骤以高精度进行间隙形成。
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Patent Agency Ranking
6.发明授权Ink jet head configured to increase packaging density of counter electrode and oscillation plate 失效喷墨头配置为增加对电极和振荡板的包装密度公开(公告)号：US06361149B1
公开(公告)日：2002-03-26
申请号：US09458355
申请日：1999-12-09
Applicant: Shuya Abe
Inventor： Shuya Abe
IPC: B41I206
CPC classification number: B41J2/14314 , B41J2002/1425 , B41J2202/03
Abstract: An ink jet head includes a nozzle plate which has a nozzle hole. An ink-chamber substrate is provided on a back of the nozzle plate and includes an integrally-formed oscillation plate and a pressure chamber. The pressure chamber contains ink and is arranged to communicate with the nozzle hole. The oscillation plate defines a bottom of the pressure chamber. A counter-electrode substrate has an electrically-isolated counter electrode. The counter electrode is arranged to face the oscillation plate via a gap between the oscillation plate and the counter electrode. A dielectric layer is interposed between the ink-chamber substrate and the counter-electrode substrate. The dielectric layer is arranged to define the gap between the oscillation plate and the counter electrode. A pad metal piece is provided on a back of the counter electrode. The pad metal piece is electrically connected to the counter electrode and a driving voltage is externally supplied from the pad metal piece to the counter electrode so that the oscillation plate is actuated to impart a force to and stress the ink within the pressure chamber.
Abstract translation: 喷墨头包括具有喷嘴孔的喷嘴板。 在喷嘴板的背面设置有墨室基板，并且包括一体形成的振动板和压力室。 压力室包含墨水并且被布置成与喷嘴孔连通。 振动板限定了压力室的底部。 对电极基板具有电隔离对置电极。 相对电极经由振荡板和对电极之间的间隙面对振荡板。 在墨室基板和对电极基板之间插入电介质层。 电介质层布置成限定振荡板和对电极之间的间隙。 在对置电极的背面设置焊垫金属片。 焊盘金属片电连接到对电极，并且驱动电压从焊盘金属片外部供应到对电极，使得振荡板被致动以对压力室内的墨施加力并施加应力。
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公开(公告)号：US10786988B2
公开(公告)日：2020-09-29
申请号：US15668839
申请日：2017-08-04
Applicant: Atsushi Takeuchi , Osamu Machida , Akira Shimofuku , Shuya Abe , Masahiro Ishimori , Takuma Hirabayashi
Inventor： Atsushi Takeuchi , Osamu Machida , Akira Shimofuku , Shuya Abe , Masahiro Ishimori , Takuma Hirabayashi
IPC: H01L41/047 , H01L41/09 , B41J2/14 , B41J2/16 , H01L41/08 , H01L41/29 , H01L41/318
Abstract: An electromechanical transducer element includes a first electrode on a substrate, an electromechanical transducer film on the first electrode, and a second electrode on the electromechanical transducer film. The electromechanical transducer film includes a thin line pattern. The thin line pattern includes a plurality of thin lines that are spaced away from each other.
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公开(公告)号：US10150293B2
公开(公告)日：2018-12-11
申请号：US15405714
申请日：2017-01-13
Applicant: Osamu Machida , Masahiro Ishimori , Atsushi Takeuchi , Shuya Abe
Inventor： Osamu Machida , Masahiro Ishimori , Atsushi Takeuchi , Shuya Abe
Abstract: An electromechanical transducer element includes a first electrode; an electromechanical transducer film stacked on one surface of the first electrode; a second electrode stacked on the electromechanical transducer film; and wiring formed on the second electrode. In an at least one cross section, each of a boundary, on a second electrode side, of the electromechanical transducer film and a boundary, on a side opposite to the electromechanical transducer film, of the second electrode is a curved shape protruding away from the first electrode. In the at least one cross section, each of a film thickness of the electromechanical transducer film and a film thickness of the second electrode becomes thinner toward end portions from a maximum height portion.
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9.发明申请Actuator, liquid drop discharge head, ink cartridge, inkjet recording device, micro pump, optical modulation device, and substrate 审中-公开执行器，液滴排放头，墨盒，喷墨记录装置，微型泵，光调制装置和基板公开(公告)号：US20060232638A1
公开(公告)日：2006-10-19
申请号：US10555218
申请日：2005-03-11
Applicant: Takahiko Kuroda , Shuya Abe
Inventor： Takahiko Kuroda , Shuya Abe
IPC: B41J2/045
CPC classification number: B41J2/1639 , B41J2/14314 , B41J2/16 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1642 , B41J2/1645 , G02B26/0841
Abstract: An actuator includes a vibration plate area displaced by an electrostatic force, and electrodes facing each other via a first space in the vibration plate area The first space is formed by a sacrificial layer process using a sacrificial layer removing hole. A barrier as a fluid resistance is formed between the first space and a second space situated in the vicinity of the sacrificial layer removing hole.
Abstract translation: 致动器包括通过静电力移动的振动板区域和经由振动板区域中的第一空间相对的电极。第一空间由使用牺牲层去除孔的牺牲层工艺形成。 在位于牺牲层去除孔附近的第一空间和第二空间之间形成作为流体阻力的屏障。
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公开(公告)号：US20050264617A1
公开(公告)日：2005-12-01
申请号：US10521055
申请日：2003-08-05
Applicant: Manabu Nishimura , Takahiko Kuroda , Shuya Abe , Makoto Tanaka , Mitsugu Irinoda , Kenichiroh Hashimoto
Inventor： Manabu Nishimura , Takahiko Kuroda , Shuya Abe , Makoto Tanaka , Mitsugu Irinoda , Kenichiroh Hashimoto
CPC classification number: B41J2/1628 , B06B1/0292 , B41J2/14314 , B41J2/16 , B41J2/1623 , B41J2/1629 , B41J2/1639 , B41J2/1642 , B41J2/1645 , B41J2/1646 , B41J2002/14411
Abstract: An electrostatic actuator has high-reliability and less variation in characteristics. An electrode (12a) is formed on a substrate (1), and a plurality of partition parts (50a) are formed on the electrode. A vibration plate (19) is formed on the partition parts (50a), and is deformable by an electrostatic force generated by a voltage applied to the electrode (12a) so that an air gap (14a) is formed between the partition parts (50a) by etching a part of a sacrifice layer (14) formed between the electrode (12a) and the vibration plate (19). The partition parts (50a) are formed of remaining parts of the sacrifice layer (14) after the etching.
Abstract translation: 静电致动器具有高可靠性和较小的特性变化。 在基板（1）上形成电极（12a），在电极上形成多个分隔部（50a）。 振动板（19）形成在分隔部分（50a）上，并且由施加到电极（12a）的电压产生的静电力变形，使得在隔板 通过蚀刻形成在电极（12a）和振动板（19）之间的牺牲层（14）的一部分，部分（50μm）。 在蚀刻之后，分隔部分（50a）由牺牲层（14）的剩余部分形成。
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