发明申请
US20050266342A1 Photoresist composition and method of forming a pattern using same
有权
光刻胶组合物和使用其形成图案的方法
- 专利标题: Photoresist composition and method of forming a pattern using same
- 专利标题(中): 光刻胶组合物和使用其形成图案的方法
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申请号: US11141736申请日: 2005-05-31
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公开(公告)号: US20050266342A1公开(公告)日: 2005-12-01
- 发明人: Kyoung-Mi Kim , Yeu-Young Youn , Youn-Kyung Wang , Jae-Ho Kim , Young-Ho Kim , Boo-Deuk Kim
- 申请人: Kyoung-Mi Kim , Yeu-Young Youn , Youn-Kyung Wang , Jae-Ho Kim , Young-Ho Kim , Boo-Deuk Kim
- 优先权: KR2004-38896 20040531
- 主分类号: G03C1/492
- IPC分类号: G03C1/492 ; G03F7/004 ; G03F7/039
摘要:
A photoresist composition for preventing exposing failures and a method of forming a pattern using the same are disclosed. The photoresist composition preferably comprises about 0.1% to about 0.5% by weight of a photo acid generator, and about 2% to about 10% by weight of a polymer resin, the PAG including a monophenyl sulfonium compound, a triphenyl sulfonium compound or a mixture thereof. The footing phenomenon and the top loss of a pattern are sufficiently prevented.
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