发明申请
US20050266342A1 Photoresist composition and method of forming a pattern using same 有权
光刻胶组合物和使用其形成图案的方法

Photoresist composition and method of forming a pattern using same
摘要:
A photoresist composition for preventing exposing failures and a method of forming a pattern using the same are disclosed. The photoresist composition preferably comprises about 0.1% to about 0.5% by weight of a photo acid generator, and about 2% to about 10% by weight of a polymer resin, the PAG including a monophenyl sulfonium compound, a triphenyl sulfonium compound or a mixture thereof. The footing phenomenon and the top loss of a pattern are sufficiently prevented.
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