发明申请
- 专利标题： Air-purifying device for a front-opening unified pod
- 专利标题（中）： 用于前开口统一舱的空气净化装置
-
申请号： US11027439申请日： 2004-12-30
-
公开(公告)号： US20050268580A1公开(公告)日： 2005-12-08
- 发明人: Toshirou Kisakibaru , Makoto Okada , Yasunori Horibe
- 申请人： Toshirou Kisakibaru , Makoto Okada , Yasunori Horibe
- 专利权人： Kondoh Industries Ltd.,Cambridge Filter Japan, Ltd.
- 当前专利权人： Kondoh Industries Ltd.,Cambridge Filter Japan, Ltd.
- 优先权： JP2004-166606 20040604
- 主分类号： H01L21/68
- IPC分类号： H01L21/68 ; B01D50/00 ; B01D53/04 ; F24F3/16
摘要：
An air-purifying device for a front-opening unified pod to purify the air in it is provided. The air in the front-opening unified pod 51 is sucked through one of its breathing holes 58a and directed into an air-purifying device (M) that comprises a fan-driving means 1, a dust-filtering means 2, and a chemical-filtering means 3. The moisture, chemical gases, and dust in the air are removed by the air-purifying device (M), and then the purified air is forced into the front-opening unified pod 51 through the other breathing hole 58b. Thus the air in the front-opening unified pod 51 is purified, and its purity is maintained by circulating the air.
公开/授权文献
- US07335244B2 Air-purifying device for a front-opening unified pod 公开/授权日：2008-02-26