Invention Application
- Patent Title: Acceleration sensor and manufacturing method thereof
- Patent Title (中): 加速度传感器及其制造方法
-
Application No.: US11063551Application Date: 2005-02-24
-
Publication No.: US20050268717A1Publication Date: 2005-12-08
- Inventor: Nobuo Ozawa
- Applicant: Nobuo Ozawa
- Priority: JP166007/2004 20040603
- Main IPC: G01P15/08
- IPC: G01P15/08 ; G01P15/12 ; G01P15/18 ; H01L29/84
Abstract:
An acceleration sensor includes a base portion shaped into the form of a frame, a weight portion located inside the base portion and disposed away from the base portion, a flexible beam portion disposed over an upper portion of the base portion and an upper portion of the weight portion and a stopper portion disposed above the base portion and disposed over the weight portion away from the weight portion, wherein the stopper portion restricts an amount of displacement of the weight portion in the direction of the stopper portion.
Public/Granted literature
- US07357026B2 Acceleration sensor Public/Granted day:2008-04-15
Information query
IPC分类:
