发明申请
- 专利标题: Method of high precision printing for manufacturing organic thin film transistor
- 专利标题(中): 制造有机薄膜晶体管的高精度印刷方法
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申请号: US11121033申请日: 2005-05-04
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公开(公告)号: US20050272212A1公开(公告)日: 2005-12-08
- 发明人: Jia-Chong Ho , Liang-Ying Huang , Tarng-Shiang Hu , Cheng-Chung Lee
- 申请人: Jia-Chong Ho , Liang-Ying Huang , Tarng-Shiang Hu , Cheng-Chung Lee
- 专利权人: Industrial Technology Research Institute
- 当前专利权人: Industrial Technology Research Institute
- 优先权: TW93123561 20040608
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; H01L29/786 ; H01L51/00 ; H01L51/05
摘要:
A method of high precision printing for manufacturing organic thin film transistor, comprising the following steps of: forming a gate on a substrate; forming an insulator layer on the substrate; forming a conducting wire electrode film on the insulator layer; forming a organic interlayer; forming a organic semiconductor layer on the organic interlayer; forming a polymer layer for channel length on the organic semiconductor layer; forming a organic electrode film; and forming a protective layer. Moreover, a means for forming layers of above mentioned method is a high precision printing selected from the consisting of Inkject Printing, Screen Printing, Blade Coating, Roller Coating, Nanoimprinting, Micro Contact Printing, Flexographic printing, Table coating and Spin Coating, etc.
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