Invention Application
US20050280052A1 Field effect transistor with local source/drain insulation and associated method of production
有权
具有局部源极/漏极绝缘的场效应晶体管及相关生产方法
- Patent Title: Field effect transistor with local source/drain insulation and associated method of production
- Patent Title (中): 具有局部源极/漏极绝缘的场效应晶体管及相关生产方法
-
Application No.: US10530634Application Date: 2003-09-17
-
Publication No.: US20050280052A1Publication Date: 2005-12-22
- Inventor: Jurgen Holz , Klaus Schrufer , Helmut Tews
- Applicant: Jurgen Holz , Klaus Schrufer , Helmut Tews
- Priority: DE10246718.8 20021007
- International Application: PCT/DE03/03130 WO 20030917
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/06 ; H01L29/76
![Field effect transistor with local source/drain insulation and associated method of production](/abs-image/US/2005/12/22/US20050280052A1/abs.jpg.150x150.jpg)
Abstract:
A field-effect transistor (FET) with local source-drain insulation is described. The FET includes a semiconductor substrate, source and drain depressions, a depression insulation layer, an electrically conductive filling layer, a gate dielectric, and a gate layer. The depression insulation layer is formed at least in bottom regions of the source and drain depressions. The electrically conductive filling layer realizes source and drain regions and fills the source and drain depressions at a surface of the depression insulation layer. The gate dielectric is formed at a substrate surface between the source and drain depressions. The gate layer (is formed at a surface of the gate dielectric. The source and drain depressions have, in an upper region, a widening with a predetermined depth for realizing defined channel connection regions.
Public/Granted literature
- US07528453B2 Field effect transistor with local source/drain insulation and associated method of production Public/Granted day:2009-05-05
Information query
IPC分类: