Invention Application
- Patent Title: Piezoelectric element, ink jet head, angular velocity sensor, method for manufacturing the same, and ink jet recording apparatus
- Patent Title (中): 压电元件，喷墨头，角速度传感器，其制造方法和喷墨记录装置
-
Application No.: US11204097Application Date: 2005-08-15
-
Publication No.: US20050280335A1Publication Date: 2005-12-22
- Inventor: Atsushi Tomozawa , Eiji Fujii , Hideo Torii , Akiko Murata , Ryoichi Takayama , Taku Hirasawa
- Applicant: Atsushi Tomozawa , Eiji Fujii , Hideo Torii , Akiko Murata , Ryoichi Takayama , Taku Hirasawa
- Applicant Address: JP Osaka
- Assignee: Matsushita Electric Industrial Co., Ltd.
- Current Assignee: Matsushita Electric Industrial Co., Ltd.
- Current Assignee Address: JP Osaka
- Priority: JP2002-159542 20020531; JP2002-159562 20020531; JP2002-355159 20021206; JP2002-355162 20021206
- Main IPC: B41J2/14
- IPC: B41J2/14 ; B41J2/16 ; G01C19/5607 ; H01L41/047 ; H01L41/22 ; H01L41/24
Abstract:
A piezoelectric element includes a first electrode layer 14 provided on a substrate 11 and made of a noble metal to which at least one additive selected from the group consisting of Mg, Ca, Sr, Ba, Al and oxides thereof is added, an orientation control layer 15 provided on the first electrode layer 14 and made of a cubic or tetragonal perovskite oxide that is preferentially oriented along a (100) or (001) plane, and a piezoelectric layer 16 provided on the orientation control layer 15 and made of a rhombohedral or tetragonal perovskite oxide that is preferentially oriented along a (001) plane.
Information query
IPC分类:
