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    Piezoelectric element, ink jet head, angular velocity sensor, method for manufacturing the same, and ink jet recording apparatus
    1.
    发明授权
    Piezoelectric element, ink jet head, angular velocity sensor, method for manufacturing the same, and ink jet recording apparatus 有权
    压电元件，喷墨头，角速度传感器，其制造方法和喷墨记录装置

    公开(公告)号：US07478558B2

    公开(公告)日：2009-01-20

    申请号：US11362583

    申请日：2006-02-24

    申请人： Eiji Fujii ,  Hideo Torii ,  Ryoichi Takayama ,  Atsushi Tomozawa ,  Akiko Murata ,  Taku Hirasawa

    发明人： Eiji Fujii ,  Hideo Torii ,  Ryoichi Takayama ,  Atsushi Tomozawa ,  Akiko Murata ,  Taku Hirasawa

    IPC分类号： G01C19/00 ,  B41J2/045 ,  H01L41/04

    CPC分类号： H01L41/0815 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1646 ,  B41J2002/14491 ,  B41J2202/03 ,  G01C19/5607 ,  H01L41/1876 ,  H01L41/316 ,  Y10T29/49401

    摘要： In a piezoelectric element, an adhesive layer 12 is provided on a substrate 11, a first electrode layer 14 made of a noble metal containing titanium or titanium oxide is provided on the adhesive layer 12, and an orientation control layer 15 that is preferentially oriented along a (100) or (001) plane is provided on the first electrode layer 14. In the vicinity of a surface of the orientation control layer 15 that is closer to the first electrode layer 14, a (100)- or (001)-oriented region extends over titanium or titanium oxide located on one surface of the first electrode layer 14 that is closer to the orientation control layer 15, and the cross-sectional area of the region in the direction perpendicular to the thickness direction gradually increases in the direction away from the first electrode layer 14 toward the opposite side. Further, a piezoelectric layer 16 that is preferentially oriented along a (001) plane is provided on the orientation control layer 15.

    摘要翻译： 在压电元件中，在基板11上设置粘合剂层12，在粘合剂层12上设置由含有钛或氧化钛的贵金属构成的第一电极层14，优选的是取向控制层15 在第一电极层14上设置有（100）或（001）面。在取向控制层15的靠近第一电极层14的表面附近，（100） - 或（001） - 位于第一电极层14的靠近取向控制层15的一个表面上的钛或氧化钛上，并且沿与厚度方向垂直的方向的区域的横截面积沿着方向 远离第一电极层14朝向相对侧。 此外，在取向控制层15上设置优选沿（001）面取向的压电体层16。

    Piezoelectric element, ink jet head, angular velocity sensor, manufacturing method thereof, and ink jet type recording apparatus
    2.
    发明授权
    Piezoelectric element, ink jet head, angular velocity sensor, manufacturing method thereof, and ink jet type recording apparatus 有权
    压电元件，喷墨头，角速度传感器，其制造方法和喷墨式记录装置

    公开(公告)号：US07033001B2

    公开(公告)日：2006-04-25

    申请号：US10472589

    申请日：2002-12-12

    申请人： Eiji Fujii ,  Hideo Torii ,  Ryoichi Takayama ,  Atsushi Tomozawa ,  Akiko Murata ,  Taku Hirasawa

    发明人： Eiji Fujii ,  Hideo Torii ,  Ryoichi Takayama ,  Atsushi Tomozawa ,  Akiko Murata ,  Taku Hirasawa

    IPC分类号： B41J2/045 ,  H01L41/04

    CPC分类号： H01L41/0815 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1646 ,  B41J2002/14491 ,  B41J2202/03 ,  G01C19/5607 ,  H01L41/1876 ,  H01L41/316 ,  Y10T29/49401

    摘要： In a piezoelectric element, an adhesive layer 12 is provided on a substrate 11, a first electrode layer 14 made of a noble metal containing titanium or titanium oxide is provided on the adhesive layer 12, and an orientation control layer 15 that is preferentially oriented along a (100) or (001) plane is provided on the first electrode layer 14. In the vicinity of a surface of the orientation control layer 15 that is closer to the first electrode layer 14, a (100)- or (001)-oriented region extends over titanium or titanium oxide located on one surface of the first electrode layer 14 that is closer to the orientation control layer 15, and the cross-sectional area of the region in the direction perpendicular to the thickness direction gradually increases in the direction away from the first electrode layer 14 toward the opposite side. Further, a piezoelectric layer 16 that is preferentially oriented along a (001) plane is provided on the orientation control layer 15.

    摘要翻译： 在压电元件中，在基板11上设置粘合剂层12，在粘合剂层12上设置由含有钛或氧化钛的贵金属构成的第一电极层14，优选的是取向控制层15 在第一电极层14上设置（100）或（001）面。 在取向控制层15的靠近第一电极层14的表面附近，位于第一电极层14的一个表面上的（100）或（001）取向区域延伸到钛或氧化钛上 更靠近取向控制层15，并且沿与厚度方向正交的方向的区域的横截面积沿远离第一电极层14的方向逐渐增大。 此外，在取向控制层15上设置优选沿（001）面取向的压电体层16。

    Piezoelectric element, ink jet head, angular velocity sensor, method for manufacturing the same, and ink jet recording apparatus
    9.
    发明申请
    Piezoelectric element, ink jet head, angular velocity sensor, method for manufacturing the same, and ink jet recording apparatus 有权
    压电元件，喷墨头，角速度传感器，其制造方法和喷墨记录装置

    公开(公告)号：US20060146097A1

    公开(公告)日：2006-07-06

    申请号：US11362583

    申请日：2006-02-24

    申请人： Eiji Fujii ,  Hideo Torii ,  Ryoichi Takayama ,  Atsushi Tomozawa ,  Akiko Murata ,  Taku Hirasawa

    发明人： Eiji Fujii ,  Hideo Torii ,  Ryoichi Takayama ,  Atsushi Tomozawa ,  Akiko Murata ,  Taku Hirasawa

    IPC分类号： B41J2/045

    CPC分类号： H01L41/0815 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1646 ,  B41J2002/14491 ,  B41J2202/03 ,  G01C19/5607 ,  H01L41/1876 ,  H01L41/316 ,  Y10T29/49401

    摘要： In a piezoelectric element, an adhesive layer 12 is provided on a substrate 11, a first electrode layer 14 made of a noble metal containing titanium or titanium oxide is provided on the adhesive layer 12, and an orientation control layer 15 that is preferentially oriented along a (100) or (001) plane is provided on the first electrode layer 14. In the vicinity of a surface of the orientation control layer 15 that is closer to the first electrode layer 14, a (100)- or (001)-oriented region extends over titanium or titanium oxide located on one surface of the first electrode layer 14 that is closer to the orientation control layer 15, and the cross-sectional area of the region in the direction perpendicular to the thickness direction gradually increases in the direction away from the first electrode layer 14 toward the opposite side. Further, a piezoelectric layer 16 that is preferentially oriented along a (001) plane is provided on the orientation control layer 15.

    摘要翻译： 在压电元件中，在基板11上设置粘合剂层12，在粘合剂层12上设置由含有钛或氧化钛的贵金属构成的第一电极层14，优选的是取向控制层15 在第一电极层14上设置（100）或（001）面。 在取向控制层15的靠近第一电极层14的表面附近，位于第一电极层14的一个表面上的（100）或（001）取向区域延伸到钛或氧化钛上 更靠近取向控制层15，并且沿与厚度方向正交的方向的区域的横截面积沿远离第一电极层14的方向逐渐增大。 此外，在取向控制层15上设置优选沿（001）面取向的压电体层16。

    Oxygen ion conductor device, method for fabricating oxygen ion conductor device, and oxygen concentration control system
    10.
    发明授权
    Oxygen ion conductor device, method for fabricating oxygen ion conductor device, and oxygen concentration control system 有权
    氧离子导体装置，氧离子导体装置的制造方法以及氧浓度控制系统

    公开(公告)号：US07306965B2

    公开(公告)日：2007-12-11

    申请号：US11064999

    申请日：2005-02-25

    申请人： Hideo Torii ,  Eiji Fujii ,  Taku Hirasawa ,  Atsushi Tomozawa

    发明人： Hideo Torii ,  Eiji Fujii ,  Taku Hirasawa ,  Atsushi Tomozawa

    IPC分类号： H01L21/00

    CPC分类号： C01B13/0251 ,  C25D1/003

    摘要： A first electrode thin film is formed on an upper surface of the oxygen ion conductive thin film so as to have a through hole. A resistor is formed on part of the upper surface of the oxygen conductive thin film located in the through hole. Thus, the oxygen ion conductive thin film can be directly heated by the resistor, so that oxygen ions can be speedily transferred with a low power. Therefore, the oxygen ion conductivity of the oxygen ion conductive thin film can be improved.

    摘要翻译： 第一电极薄膜形成在氧离子传导性薄膜的上表面上以具有通孔。 在位于通孔中的导电薄膜的上表面的一部分上形成电阻器。 因此，可以通过电阻器直接加热氧离子传导性薄膜，能够以低功率快速地转移氧离子。 因此，能够提高氧离子传导性薄膜的氧离子传导性。