发明申请
US20050283498A1 System and method to build, retrieve and track information in a knowledge database for trouble shooting purposes
审中-公开
用于构建,检索和跟踪知识数据库中的信息以进行故障排除的系统和方法
- 专利标题: System and method to build, retrieve and track information in a knowledge database for trouble shooting purposes
- 专利标题(中): 用于构建,检索和跟踪知识数据库中的信息以进行故障排除的系统和方法
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申请号: US10873553申请日: 2004-06-22
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公开(公告)号: US20050283498A1公开(公告)日: 2005-12-22
- 发明人: Wen-Chang Kuo , Tien-Der Chiang , Chien-Chung Huang , Mu-Tsang Lin , Yi-Lin Huang , Chun-Yi Chen , Chi Wang
- 申请人: Wen-Chang Kuo , Tien-Der Chiang , Chien-Chung Huang , Mu-Tsang Lin , Yi-Lin Huang , Chun-Yi Chen , Chi Wang
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 主分类号: G06F17/30
- IPC分类号: G06F17/30
摘要:
A method of building a problem troubleshooting database for use in a semiconductor manufacturing system includes storing semiconductor manufacturing problem data in a problem troubleshooting database; storing cause data in the problem troubleshooting database, the cause data being associated with respective problem data; storing solution data in the problem troubleshooting database, the solution data being associated with respective semiconductor manufacturing problem data and cause data; evaluating the effectiveness of the solution data; and updating the solution data with information with respect to the effectiveness determined in the evaluating step.
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