发明申请
- 专利标题: Built in purifier for reactive gases
- 专利标题(中): 内置反应气体净化器
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申请号: US10884824申请日: 2004-07-02
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公开(公告)号: US20060000850A1公开(公告)日: 2006-01-05
- 发明人: Jean Vincent , Ronald Pearlstein , Kerry Berger , Anthony Lachawiec,
- 申请人: Jean Vincent , Ronald Pearlstein , Kerry Berger , Anthony Lachawiec,
- 主分类号: B67D5/00
- IPC分类号: B67D5/00
摘要:
The present invention is an apparatus for containing and dispensing a high purity fluid comprising an outer vessel capable of containing a quantity of high purity fluid in its interior; an outlet associated with the outer vessel for dispensing the high purity fluid; a valve capable of controlling high purity fluid flow out of the outer vessel through the outlet; an inner vessel at least partly situated in the outer vessel and communicating with the outlet and an inlet which communicates with the interior of the outer vessel; a purification media contained within the inner vessel for purifying the high purity fluid of undesired components; and fluid flow control device which prevents high purity fluid from flowing from the inner vessel to the interior of the outer vessel.
公开/授权文献
- US07160359B2 Built in purifier for reactive gases 公开/授权日:2007-01-09