Built in purifier for reactive gases
    2.
    发明申请
    Built in purifier for reactive gases 有权
    内置反应气体净化器

    公开(公告)号:US20060000850A1

    公开(公告)日:2006-01-05

    申请号:US10884824

    申请日:2004-07-02

    IPC分类号: B67D5/00

    摘要: The present invention is an apparatus for containing and dispensing a high purity fluid comprising an outer vessel capable of containing a quantity of high purity fluid in its interior; an outlet associated with the outer vessel for dispensing the high purity fluid; a valve capable of controlling high purity fluid flow out of the outer vessel through the outlet; an inner vessel at least partly situated in the outer vessel and communicating with the outlet and an inlet which communicates with the interior of the outer vessel; a purification media contained within the inner vessel for purifying the high purity fluid of undesired components; and fluid flow control device which prevents high purity fluid from flowing from the inner vessel to the interior of the outer vessel.

    摘要翻译: 本发明是一种用于容纳和分配高纯度流体的装置,其包括能够在其内部容纳一定量的高纯度流体的外部容器; 与用于分配高纯度流体的外部容器相关联的出口; 能够通过出口控制高纯度流体流出外容器的阀; 至少部分地位于所述外部容器中并与所述出口连通的内部容器和与所述外部容器的内部连通的入口; 内部容器中的净化介质,用于净化不期望的组分的高纯度流体; 以及流体流动控制装置,其防止高纯度流体从内部容器流动到外部容器的内部。