- 专利标题: Lithographic apparatus and a device manufacturing method
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申请号: US10888513申请日: 2004-07-12
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公开(公告)号: US20060007414A1公开(公告)日: 2006-01-12
- 发明人: Bernardus Antonius Luttikhuis , Petrus Bartray , Johannes Henricus Jacobs , Thijs Harink , Paulus Liebregts
- 申请人: Bernardus Antonius Luttikhuis , Petrus Bartray , Johannes Henricus Jacobs , Thijs Harink , Paulus Liebregts
- 申请人地址: NL Veldhoven
- 专利权人: ASML NETHERLANDS B.V.
- 当前专利权人: ASML NETHERLANDS B.V.
- 当前专利权人地址: NL Veldhoven
- 主分类号: G03B27/52
- IPC分类号: G03B27/52 ; G03B27/42
摘要:
A lithographic apparatus is disclosed. The apparatus includes a support constructed to support a patterning device, the patterning device being capable of imparting a radiation beam with a pattern in its cross-section to form a patterned radiation beam. A projection system is configured to project the patterned radiation beam onto a target portion of a substrate. A first vacuum environment contains the projection system, a second vacuum environment contains the patterning device support, and a separator separates the first and second vacuum environments. The separator includes an aperture for passing the projection beam from the first vacuum environment towards the patterning device and/or vice-versa. The patterning device forms at least part of a seal for substantially sealing the aperture of the separator.
公开/授权文献
- US07126664B2 Lithographic apparatus and a device manufacturing method 公开/授权日:2006-10-24
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