发明申请
- 专利标题: CD uniformity in high track density recording head
- 专利标题(中): 高跟踪密度记录头的CD均匀性
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申请号: US10886888申请日: 2004-07-08
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公开(公告)号: US20060007602A1公开(公告)日: 2006-01-12
- 发明人: Cherng-Chyi Han , Laurie Lauchlan , Xiaomin Liu
- 申请人: Cherng-Chyi Han , Laurie Lauchlan , Xiaomin Liu
- 专利权人: Headway Technologies, Inc.
- 当前专利权人: Headway Technologies, Inc.
- 主分类号: G11B5/235
- IPC分类号: G11B5/235 ; G11B5/147 ; G11B5/127 ; G11B5/33
摘要:
For high track density recording, tighter reader and writer track width control are essential. This has been achieved by using the write gap layer as the plating seed on which the upper pole is electro-formed. This allows the write gap layer to be deposited through a precisely controllable process such as sputtering. Since less material needs to be removed during pole trimming, a thinner layer of photoresist may be used. This, in turn, makes possible a lower CD for the structure.
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