Invention Application
- Patent Title: CD uniformity in high track density recording head
- Patent Title (中): 高跟踪密度记录头的CD均匀性
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Application No.: US10886888Application Date: 2004-07-08
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Publication No.: US20060007602A1Publication Date: 2006-01-12
- Inventor: Cherng-Chyi Han , Laurie Lauchlan , Xiaomin Liu
- Applicant: Cherng-Chyi Han , Laurie Lauchlan , Xiaomin Liu
- Assignee: Headway Technologies, Inc.
- Current Assignee: Headway Technologies, Inc.
- Main IPC: G11B5/235
- IPC: G11B5/235 ; G11B5/147 ; G11B5/127 ; G11B5/33

Abstract:
For high track density recording, tighter reader and writer track width control are essential. This has been achieved by using the write gap layer as the plating seed on which the upper pole is electro-formed. This allows the write gap layer to be deposited through a precisely controllable process such as sputtering. Since less material needs to be removed during pole trimming, a thinner layer of photoresist may be used. This, in turn, makes possible a lower CD for the structure.
Public/Granted literature
- US07293344B2 Process of making CD uniformity in high track density recording head Public/Granted day:2007-11-13
Information query
IPC分类: