发明申请
US20060007602A1 CD uniformity in high track density recording head 失效
高跟踪密度记录头的CD均匀性

CD uniformity in high track density recording head
摘要:
For high track density recording, tighter reader and writer track width control are essential. This has been achieved by using the write gap layer as the plating seed on which the upper pole is electro-formed. This allows the write gap layer to be deposited through a precisely controllable process such as sputtering. Since less material needs to be removed during pole trimming, a thinner layer of photoresist may be used. This, in turn, makes possible a lower CD for the structure.
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