发明申请
- 专利标题: Method for producing a component comprising a conductor structure that is suitable for use at high frequencies
- 专利标题(中): 用于制造包括适于在高频下使用的导体结构的部件的方法
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申请号: US10515035申请日: 2003-05-23
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公开(公告)号: US20060012005A1公开(公告)日: 2006-01-19
- 发明人: Jurgen Leib , Dietrich Mund
- 申请人: Jurgen Leib , Dietrich Mund
- 优先权: DE10222609.1 20020523
- 国际申请: PCT/EP03/05415 WO 20030523
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; H01L21/4763
摘要:
The invention provides a process for producing a substrate having a conductor arrangement that is suitable for radio-frequency applications, with improved radio-frequency properties. For this purpose, the process includes the steps of: depositing a structured glass layer having at least one opening over a contact-connection region by evaporation coating on the substrate, and applying at least one conductor structure to the structured glass layer so that the at least one conductor has electrical contact with the contact-connection region.
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