- 专利标题： Radiation-curable anti-reflective coating system
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申请号： US11225317申请日： 2005-09-12
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公开(公告)号： US20060014101A1公开(公告)日： 2006-01-19
- 发明人: Liu He , Sung-Soon Park , Haixing Zheng , Grace Tang , Aylin Vance
- 申请人： Liu He , Sung-Soon Park , Haixing Zheng , Grace Tang , Aylin Vance
- 主分类号： G03C1/492
- IPC分类号： G03C1/492
摘要：
A radiation-curable anti-reflective coating is disclosed. The coating may be deposited on a substrate by spinning, dipping or rolling. The anti-reflective coating may have two layers in which case the anti-reflective coating has a V-shaped reflectance pattern in the visible wavelength spectrum. The anti-reflective coating may have three layers in which case the anti-reflective coating has a broadband reflectance pattern in the visible wavelength spectrum.
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