发明申请
- 专利标题： Systems and methods for nanowire growth and harvesting
- 专利标题（中）： 纳米线生长和收获的系统和方法
-
申请号： US11117703申请日： 2005-04-29
-
公开(公告)号： US20060019472A1公开(公告)日： 2006-01-26
- 发明人: Yaoling Pan , Xiangfeng Duan , Robert Dubrow , Jay Goldman , Shahriar Mostarshed , Chunming Niu , Linda Romano , Dave Stumbo
- 申请人： Yaoling Pan , Xiangfeng Duan , Robert Dubrow , Jay Goldman , Shahriar Mostarshed , Chunming Niu , Linda Romano , Dave Stumbo
- 申请人地址： US CA Palo Alto
- 专利权人： Nanosys, Inc.
- 当前专利权人： Nanosys, Inc.
- 当前专利权人地址： US CA Palo Alto
- 主分类号： H01L21/20
- IPC分类号： H01L21/20 ; H01L21/4763
摘要：
The present invention is directed to systems and methods for nanowire growth and harvesting. In an embodiment, methods for nanowire growth and doping are provided, including methods for epitaxial oriented nanowire growth using a combination of silicon precursors. In a further aspect of the invention, methods to improve nanowire quality through the use of sacrifical growth layers are provided. In another aspect of the invention, methods for transferring nanowires from one substrate to another substrate are provided.
公开/授权文献
- US07105428B2 Systems and methods for nanowire growth and harvesting 公开/授权日：2006-09-12