发明申请
US20060019586A1 Carrier head for chemical mechanical polishing 失效
化学机械抛光用载体头

Carrier head for chemical mechanical polishing
摘要:
A carrier head for supporting a wafer during a chemical mechanical polishing process is provided. In one exemplary implementation, the carrier head may comprise a wear ring, and a slidably movable pressure plate disposed within the wear ring. The pressure plate may be arranged to provide slidable movement relative to the wear ring. This degree of freedom can accommodate height dimensional changes that may occur in the wear ring.
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