Invention Application
- Patent Title: Micromachined optical pressure sensor
- Patent Title (中): 微加工光学压力传感器
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Application No.: US11014007Application Date: 2004-12-16
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Publication No.: US20060023988A1Publication Date: 2006-02-02
- Inventor: Anthony Kurtz , Boaz Kochman , Joseph VanDeWeert
- Applicant: Anthony Kurtz , Boaz Kochman , Joseph VanDeWeert
- Main IPC: G02B6/00
- IPC: G02B6/00
Abstract:
A pressure sensor including: a deflectable diaphragm including a substantially central boss and channel; and, an optical waveguide having first and second arms, wherein the first arm is substantially aligned with an edge of the boss and the second arm is substantially aligned with an edge of the channel.
Public/Granted literature
- US07440645B2 Micromachined optical pressure sensor Public/Granted day:2008-10-21
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