发明申请
- 专利标题: Method of producing magnetic recording medium, magnetic recording medium and magnetic storage apparatus
- 专利标题(中): 制造磁记录介质的方法,磁记录介质和磁存储装置
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申请号: US10993071申请日: 2004-11-19
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公开(公告)号: US20060024532A1公开(公告)日: 2006-02-02
- 发明人: Reiko Murao , Kenji Sato
- 申请人: Reiko Murao , Kenji Sato
- 专利权人: FUJITSU LIMITED
- 当前专利权人: FUJITSU LIMITED
- 优先权: JP2004-218914 20040727
- 主分类号: B05D5/12
- IPC分类号: B05D5/12 ; G11B5/66
摘要:
A method of producing a magnetic recording medium having a recording layer that is magnetized in a recording direction to record information in the recording layer, includes forming a seed layer made of an amorphous CoW or an amorphous CoW alloy material on a substrate surface, forming an underlayer on the seed layer, and forming the recording layer on the underlayer. The forming of the seed layer includes arranging a target to confront the substrate surface, sputtering with respect to the substrate surface sputtering particles of the target from one of two sides partitioned by a first plane that is formed by the recording direction and a substrate normal which is normal to the substrate surface in a predetermined direction inclined with respect to the substrate normal, and oxidizing a surface of the seed layer on which the underlayer is formed.
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