发明申请
US20060024532A1 Method of producing magnetic recording medium, magnetic recording medium and magnetic storage apparatus 审中-公开
制造磁记录介质的方法,磁记录介质和磁存储装置

  • 专利标题: Method of producing magnetic recording medium, magnetic recording medium and magnetic storage apparatus
  • 专利标题(中): 制造磁记录介质的方法,磁记录介质和磁存储装置
  • 申请号: US10993071
    申请日: 2004-11-19
  • 公开(公告)号: US20060024532A1
    公开(公告)日: 2006-02-02
  • 发明人: Reiko MuraoKenji Sato
  • 申请人: Reiko MuraoKenji Sato
  • 专利权人: FUJITSU LIMITED
  • 当前专利权人: FUJITSU LIMITED
  • 优先权: JP2004-218914 20040727
  • 主分类号: B05D5/12
  • IPC分类号: B05D5/12 G11B5/66
Method of producing magnetic recording medium, magnetic recording medium and magnetic storage apparatus
摘要:
A method of producing a magnetic recording medium having a recording layer that is magnetized in a recording direction to record information in the recording layer, includes forming a seed layer made of an amorphous CoW or an amorphous CoW alloy material on a substrate surface, forming an underlayer on the seed layer, and forming the recording layer on the underlayer. The forming of the seed layer includes arranging a target to confront the substrate surface, sputtering with respect to the substrate surface sputtering particles of the target from one of two sides partitioned by a first plane that is formed by the recording direction and a substrate normal which is normal to the substrate surface in a predetermined direction inclined with respect to the substrate normal, and oxidizing a surface of the seed layer on which the underlayer is formed.
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