发明申请
- 专利标题： HOST CONTROL FOR A VARIETY OF TOOLS IN SEMICONDUCTOR FABS
- 专利标题（中）： 用于半导体器件中的多种工具的主机控制
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申请号： US10710709申请日： 2004-07-29
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公开(公告)号： US20060025880A1公开(公告)日： 2006-02-02
- 发明人: Padmavathi Chukka , Ying Du , Barry Herbold , Benjamin Herta , Krithikpriya Kunka , Frank Liang , Robert MacHugh , Sorabh Murgai , Thomas O'Leary , Chinmay Oza , Rakesh Parimi , Martin Soyka
- 申请人： Padmavathi Chukka , Ying Du , Barry Herbold , Benjamin Herta , Krithikpriya Kunka , Frank Liang , Robert MacHugh , Sorabh Murgai , Thomas O'Leary , Chinmay Oza , Rakesh Parimi , Martin Soyka
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 主分类号： G06F19/00
- IPC分类号： G06F19/00
摘要：
A software module for use within an integrated circuit fabrication facility sends commands to a tool according to a method that operates with any tool that satisfies SEMI standards to add or subtract steps in a process without reprogramming or recompiling. The program operates autonomously to change parameters of commands that it sends to the tool to improve performance of the fab.
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