发明申请
- 专利标题： Coating apparatus and coating method
- 专利标题（中）： 涂布设备和涂布方法
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申请号： US11177294申请日： 2005-07-11
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公开(公告)号： US20060029740A1公开(公告)日： 2006-02-09
- 发明人: Naoaki Sakurai , Tsuyoshi Sato , Masakuni Ikagawa
- 申请人： Naoaki Sakurai , Tsuyoshi Sato , Masakuni Ikagawa
- 申请人地址： JP Tokyo
- 专利权人： KABUSHIKI KAISHA TOSHIBA
- 当前专利权人： KABUSHIKI KAISHA TOSHIBA
- 当前专利权人地址： JP Tokyo
- 优先权： JP2004-204927 20040712
- 主分类号： B05D3/04
- IPC分类号： B05D3/04 ; B05C13/02 ; B05C11/00
摘要：
In applying a coating liquid including a solute and a solvent onto a given area on a substrate so as to allow the coating liquid to be solidified on the substrate by volatizing the solvent, an atmosphere in a vicinity of a coated area of the substrate is kept under an atmosphere that reduces volatilization of the solvent until applying the coating liquid onto the given area of the substrate is finished.