发明申请
- 专利标题: Method and apparatus for generating a wafer map
- 专利标题(中): 用于产生晶片图的方法和装置
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申请号: US10896190申请日: 2004-07-21
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公开(公告)号: US20060031801A1公开(公告)日: 2006-02-09
- 发明人: Thomas McIntyre , Scott Arnold
- 申请人: Thomas McIntyre , Scott Arnold
- 专利权人: BAE SYSTEMS INFORMATION AND ELECTRONIC SYSTEMS INTEGRATION, INC.
- 当前专利权人: BAE SYSTEMS INFORMATION AND ELECTRONIC SYSTEMS INTEGRATION, INC.
- 主分类号: G06F17/50
- IPC分类号: G06F17/50
摘要:
A system is provided to aid in the laying out of circuits on a semiconductor wafer, in which a wafer map is automatically generated when entering chip sizes, arrangements and other enterable factors, with the goal to maximize yield probability. The subject system accommodates different chip types and arrangements within a wafer map and addresses edge exclusion, the utilization of chiplets and the accommodation of different centering techniques, including a variety of ways of measuring offsets, while outputting a display of the replicated circuits on the wafer as well as chip count and density, utilizing a portable, tailorable, extendable PC-based program featuring an easy-to-use graphical interface. The software application provides the user with different graphical views customized for the different process areas, such as lithography and dicing, with the application being useful for any semiconductor manufacturing facility, foundry or similar industry that needs to generate wafer maps automatically to maximize yield probability.
公开/授权文献
- US07243325B2 Method and apparatus for generating a wafer map 公开/授权日:2007-07-10
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