Invention Application
US20060037933A1 Mirror process using tungsten passivation layer for preventing metal-spiking induced mirror bridging and improving mirror curvature
审中-公开
使用钨钝化层的镜面工艺，用于防止金属尖峰引起的反射镜桥接和改善镜面曲率
- Patent Title: Mirror process using tungsten passivation layer for preventing metal-spiking induced mirror bridging and improving mirror curvature
- Patent Title (中): 使用钨钝化层的镜面工艺，用于防止金属尖峰引起的反射镜桥接和改善镜面曲率
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Application No.: US10923026Application Date: 2004-08-23
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Publication No.: US20060037933A1Publication Date: 2006-02-23
- Inventor: Wei-Ya Wang , Chung-Yuan Cheng , Tzu-Yang Wu , Keven Hung , Fei-Yuh Chen
- Applicant: Wei-Ya Wang , Chung-Yuan Cheng , Tzu-Yang Wu , Keven Hung , Fei-Yuh Chen
- Main IPC: C23F1/00
- IPC: C23F1/00 ; B44C1/22
Abstract:
A mirror process uses a tungsten passivation layer to prevent metal-spiking induced mirror bridging and improve mirror curvature. A mirror structure is patterned on a first sacrificial layer overlying a substrate. A tungsten passivation layer is then blanket deposited to cover the top and sidewalls of the mirror structure. A second sacrificial layer is formed overlying the tungsten passivation layer. A releasing process with an etchant including XeF2 is performed to remove the second sacrificial layer, the tungsten passivation layer and the first sacrificial layer simultaneously.
Public/Granted literature
- US1740196A Process of making metallic casks Public/Granted day:1929-12-17
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