发明申请
US20060043616A1 FINFET WITH LOW GATE CAPACITANCE AND LOW EXTRINSIC RESISTANCE
有权
具有低门电容和低极限电阻的FINFET
- 专利标题: FINFET WITH LOW GATE CAPACITANCE AND LOW EXTRINSIC RESISTANCE
- 专利标题(中): 具有低门电容和低极限电阻的FINFET
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申请号: US10711170申请日: 2004-08-30
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公开(公告)号: US20060043616A1公开(公告)日: 2006-03-02
- 发明人: Brent Anderson , Andres Bryant , Edward Nowak
- 申请人: Brent Anderson , Andres Bryant , Edward Nowak
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L31/109
- IPC分类号: H01L31/109
摘要:
A FinFET device and a method of lowering a gate capacitance and extrinsic resistance in a field effect transistor, wherein the method comprises forming an isolation layer comprising a BOX layer over a substrate, configuring source/drain regions above the isolation layer, forming a fin structure over the isolation layer, configuring a first gate electrode adjacent to the fin structure, disposing a gate insulator between the first gate electrode and the fin structure, positioning a second gate electrode transverse to the first gate electrode, and depositing a third gate electrode on the fin structure, the first gate electrode, and the second gate electrode, wherein the isolation layer is formed beneath the insulator, the first gate electrode, and the fin structure. The method further comprises sandwiching the second gate electrode with a dielectric material. The fin structure is formed by depositing an oxide layer over a silicon layer.
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