发明申请
- 专利标题: Flash memory device using semiconductor fin and method thereof
- 专利标题(中): 使用半导体鳍片的闪存器件及其方法
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申请号: US11216677申请日: 2005-08-31
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公开(公告)号: US20060044915A1公开(公告)日: 2006-03-02
- 发明人: Ji-Hoon Park , Seung-Beom Yoon , Jeong-Uk Han , Seong-Gyun Kim , Sung-Taeg Kang , Bo-Young Seo , Sang-Woo Kang , Sung-Woo Park
- 申请人: Ji-Hoon Park , Seung-Beom Yoon , Jeong-Uk Han , Seong-Gyun Kim , Sung-Taeg Kang , Bo-Young Seo , Sang-Woo Kang , Sung-Woo Park
- 优先权: KR2004-69666 20040901
- 主分类号: G11C7/00
- IPC分类号: G11C7/00
摘要:
A flash memory device according to the present invention includes a semiconductor fin including a top surface and a side surface originated from different crystal planes. The flash memory device comprises: insulating layers having different thicknesses formed on a side surface and a top surface of the semiconductor fin, a storage electrode, a gate insulating layer and a control gate electrode sequentially formed on the insulating layers. A thin insulating layer enables charges to be injected or emitted through it, and a thick insulating layer increases a coupling ratio. Accordingly, it is possible to increase an efficiency of a programming or an erase operation of a flash memory device.
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