Invention Application
US20060046419A1 Double-sided container capacitors using a sacrificial layer 有权
双面容器电容器采用牺牲层

Double-sided container capacitors using a sacrificial layer
Abstract:
Double-sided container capacitors are formed using sacrificial layers. A sacrificial layer is formed within a recess in a structural layer. A lower electrode is formed within the recess. The sacrificial layer is removed to create a space to allow access to the sides of the structural layer. The structural layer is removed, creating an isolated lower electrode. The lower electrode can be covered with a capacitor dielectric and upper electrode to form a double-sided container capacitor.
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