发明申请
- 专利标题: Method of forming epitaxial silicon-comprising material and a method of forming a vertical transistor
- 专利标题(中): 形成外延含硅材料的方法和形成垂直晶体管的方法
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申请号: US10931924申请日: 2004-09-01
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公开(公告)号: US20060046442A1公开(公告)日: 2006-03-02
- 发明人: Nirmal Ramaswamy , Gurtej Sandhu , Cem Basceri , Eric Blomiley
- 申请人: Nirmal Ramaswamy , Gurtej Sandhu , Cem Basceri , Eric Blomiley
- 主分类号: H01L21/20
- IPC分类号: H01L21/20
摘要:
The invention includes methods of forming epitaxial silicon-comprising material and methods of forming vertical transistors. In one implementation, a method of forming epitaxial silicon-comprising material includes providing a substrate comprising monocrystalline material. A first portion of the monocrystalline material is outwardly exposed while a second portion of the monocrystalline material is masked. A first silicon-comprising layer is epitaxially grown from the exposed monocrystalline material of the first portion and not from the monocrystalline material of the masked second portion. After growing the first silicon-comprising layer, the second portion of the monocrystalline material is unmasked. A second silicon-comprising layer is then epitaxially grown from the first silicon-comprising layer and from the unmasked monocrystalline material of the second portion. Other aspects and implementations are contemplated.
公开/授权文献
- US07144779B2 Method of forming epitaxial silicon-comprising material 公开/授权日:2006-12-05
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