发明申请
- 专利标题: Displacement estimation system and method
- 专利标题(中): 位移估计系统和方法
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申请号: US10930614申请日: 2004-08-31
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公开(公告)号: US20060047473A1公开(公告)日: 2006-03-02
- 发明人: Carl Picciotto , Jun Gao , Wei Wu
- 申请人: Carl Picciotto , Jun Gao , Wei Wu
- 主分类号: G01B21/02
- IPC分类号: G01B21/02
摘要:
A displacement estimation system comprising a data acquisition system and a processing system is provided. The data acquisition system is configured to capture a first frame from a first substrate including a first pattern and a second substrate including a second pattern at a first time and capture a second frame from a third substrate including a third pattern and a fourth substrate including a fourth pattern at a second time subsequent to the first time. The first pattern and the third pattern are substantially identical, and the second pattern and the fourth pattern are substantially identical. The processing system is configured to calculate a first displacement between the first pattern and the third pattern using the first frame and the second frame and calculate a second displacement between the second pattern and the fourth pattern using the first frame and the second frame.
公开/授权文献
- US07085673B2 Displacement estimation system and method 公开/授权日:2006-08-01
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