Free-radical polymerization process producing aqueous polymer dispersion with low residual monomer content utilizing oil and water soluble initiators
    2.
    发明授权
    Free-radical polymerization process producing aqueous polymer dispersion with low residual monomer content utilizing oil and water soluble initiators 有权
    使用油和水溶性引发剂制备具有低残留单体含量的聚合物水分散体的自由基聚合方法

    公开(公告)号:US08034885B2

    公开(公告)日:2011-10-11

    申请号:US10566248

    申请日:2004-07-08

    IPC分类号: C08F2/00 C08F2/16 C08G85/00

    CPC分类号: C08F2/22

    摘要: The present invention provides a novel one-step process for preparing an aqueous polymer dispersion by the free radical aqueous emulsion polymerization comprising mixing at least water, a dispersant, and an oil-soluble initiator; raising a temperature from the starting to the end reaction temperature while metering at least ethylenically unsaturated monomers and a water-soluble initiator into a reaction vessel, conducting polymerization of the monomers in the presence of the water-soluble initiator at a temperature up to the end reaction temperature, and when the temperature has reached the end reaction temperature, conducting polymerization by the oil-soluble initiator. The oil-soluble initiator is inactive at the starting reaction temperature and becomes more active as a temperature approaches the end reaction temperature at which the oil-soluble initiator is fully active.

    摘要翻译: 本发明提供一种通过自由基水乳液聚合制备含水聚合物分散体的新型一步法,包括至少混合水,分散剂和油溶性引发剂; 从开始到结束的反应温度升高温度,同时至少将烯属不饱和单体和水溶性引发剂计量到反应容器中,在水溶性引发剂的存在下在最终达到最终温度下进行单体聚合 反应温度,当温度达到最终反应温度时,通过油溶性引发剂进行聚合。 油溶性引发剂在起始反应温度下无活性,随着温度接近油溶性引发剂完全活化的最终反应温度,其变得更有活性。

    Displacement measurements using phase changes
    4.
    发明授权
    Displacement measurements using phase changes 失效
    使用相位变化进行位移测量

    公开(公告)号:US07609858B2

    公开(公告)日:2009-10-27

    申请号:US10931414

    申请日:2004-08-31

    IPC分类号: G06K9/00

    CPC分类号: G01B11/002 G06T7/262 G06T7/37

    摘要: A measurement process or system transforms image data corresponding to images of an object to the frequency domain and analyzes the frequency domain data to determine a displacement of the object occurring between first and second images. Analysis in the frequency domain simplifies identification and handling of data expected to be noisy. In particular, frequencies corresponding to modes of vibration, lighting variation, or sensor error characteristic of a measurement system or frequencies corresponding to small magnitude frequency-domain data can be given little or no weighting in analysis that provides the displacement measurement. In one embodiment, Fourier transforms of shifted and unshifted images differ by a phase delay. A least square fit slope of the phase values associated with the phase delay can indicate displacements to accuracies less than 1% of a pixel width, thereby providing nanometer scale precision using imaging systems having a pixel width of about 1 μm.

    摘要翻译: 测量过程或系统将对应于对象的图像的图像数据变换到频域,并分析频域数据以确定在第一和第二图像之间发生的对象的位移。 频域分析简化了预计嘈杂的数据的识别和处理。 特别地,对应于测量系统的振动模式,照明变化或传感器误差特性的频率或与小幅度频域数据相对应的频率的频率,在提供位移测量的分析中可以很少或没有加权。 在一个实施例中,移位和未移位图像的傅里叶变换相位延迟。 与相位延迟相关的相位值的最小平方拟合斜率可以指示小于像素宽度的1%的精度位移,从而使用具有约1um的像素宽度的成像系统提供纳米级精度。

    Measuring sub-wavelength displacements
    5.
    发明授权
    Measuring sub-wavelength displacements 失效
    测量亚波长位移

    公开(公告)号:US07283677B2

    公开(公告)日:2007-10-16

    申请号:US10931647

    申请日:2004-08-31

    IPC分类号: G06K9/46

    摘要: Measurement systems and methods extend the use of optical navigation to measure displacements smaller than a wavelength of the light used to capture images of an object measured. Nanometer-scale movements can thus be measured, for example, in equipment used for manufacture of integrated circuits or nanometer scale devices.

    摘要翻译: 测量系统和方法扩展了光学导航的使用,以测量小于用于捕获测量对象的图像的光的波长的位移。 因此,可以例如在用于制造集成电路或纳米级装置的设备中测量纳米级的运动。

    Sensing alignment of multiple layers
    6.
    发明授权
    Sensing alignment of multiple layers 失效
    感应多层的对齐

    公开(公告)号:US07226797B2

    公开(公告)日:2007-06-05

    申请号:US10995837

    申请日:2004-11-23

    IPC分类号: H01L21/00

    CPC分类号: G06T7/0004

    摘要: Using an imaging system in relation to a plurality of material layers in an initial alignment state is provided, a first of the plurality of material layers at least partially obscuring a second of the plurality of material layers in the initial alignment state. The first material layer is moved from a first position corresponding to the initial alignment state to a second position out of a field of view of the imaging system, and a first image of the second material layer is stored. The first material layer is moved back the first position to restore the initial alignment state. A second image of the first material layer is acquired. The second image and the stored first image are processed to determine the initial alignment state.

    摘要翻译: 提供了在初始对准状态下相对于多个材料层使用成像系统,多个材料层中的第一个在初始对准状态下至少部分地遮蔽多个材料层中的第二个材料层。 第一材料层从对应于初始取向状态的第一位置移动到成像系统的视野外的第二位置,并且存储第二材料层的第一图像。 第一材料层被移回第一位置以恢复初始对准状态。 获取第一材料层的第二图像。 处理第二图像和存储的第一图像以确定初始对准状态。

    Positioning system and method using displacements
    7.
    发明申请
    Positioning system and method using displacements 审中-公开
    使用位移的定位系统和方法

    公开(公告)号:US20070046940A1

    公开(公告)日:2007-03-01

    申请号:US11209084

    申请日:2005-08-22

    IPC分类号: G01B11/00

    摘要: A method comprising capturing a first image that includes a target on a substrate, adjusting a first relative position between the substrate and a fabrication unit, capturing a second image that includes the target subsequent to adjusting the first relative position, and determining whether a first displacement of the target in the second image relative to the target the first image indicates that a second relative position between the substrate and the fabrication unit has been achieved is provided.

    摘要翻译: 一种方法,包括:在基板上捕获包括目标的第一图像,调整所述基板和制造单元之间的第一相对位置,在调整所述第一相对位置之后,捕获包括所述目标的第二图像,以及确定第一位移 提供了相对于目标的第二图像中的目标的第一图像表示已经实现了基板和制造单元之间的第二相对位置。

    Displacement sensing by comparing matrices of pointwise measurements
    8.
    发明申请
    Displacement sensing by comparing matrices of pointwise measurements 失效
    通过比较点测量矩阵进行位移检测

    公开(公告)号:US20060106567A1

    公开(公告)日:2006-05-18

    申请号:US10994055

    申请日:2004-11-18

    IPC分类号: G06F15/00

    CPC分类号: G01D5/347 G06T7/246 G06T7/70

    摘要: Determining a displacement of a substantially rigid item relative to a frame of reference between a first time and a second time is described. At the first time, a first set of pointwise measurements of a physical property of the item taken at a plurality of fixed locations relative to the frame of reference is acquired. At the second time, a second set of pointwise measurements of the physical property taken at the plurality of fixed locations is acquired. A first matrix derived from the first set of pointwise measurements is compared to a second matrix derived from the second set of pointwise measurements to determine the displacement.

    摘要翻译: 描述在第一时间和第二时间之间确定基本上刚性的物品相对于参考系的位移。 在第一时间,获取在相对于参考帧在多个固定位置拍摄的物品的物理属性的第一组点测量。 在第二次,获取在多个固定位置处取得的物理属性的第二组点测量。 将来自第一组点测量的第一矩阵与从第二组点测量导出的第二矩阵进行比较,以确定位移。

    Imprint lithography apparatus and method employing an effective pressure
    9.
    发明申请
    Imprint lithography apparatus and method employing an effective pressure 有权
    压印光刻设备和采用有效压力的方法

    公开(公告)号:US20060043626A1

    公开(公告)日:2006-03-02

    申请号:US10931672

    申请日:2004-09-01

    IPC分类号: B29C59/02

    摘要: An imprint apparatus and method employ an effective pressure in imprint lithography. The imprint apparatus includes a compressible chamber that encloses an imprint mold having a mold pattern and a sample to be imprinted. The chamber is compressed to imprint the mold pattern on the sample. The mold is pressed against the sample with the effective pressure. The effective pressure is controlled by a selected ratio of a cavity area of the chamber to a contact area between the mold and the sample.

    摘要翻译: 压印设备和方法在压印光刻中采用有效压力。 压印装置包括可压缩室,其包围具有模具图案和要印刷的样品的压印模具。 压缩室以将模具图案压印在样品上。 模具以有效的压力压在样品上。 有效压力通过腔室的空腔面积与模具和样品之间的接触面积的选定比例来控制。

    Method and apparatus for distinguishing transparent media
    10.
    发明授权
    Method and apparatus for distinguishing transparent media 有权
    用于区分透明介质的方法和装置

    公开(公告)号:US06497179B1

    公开(公告)日:2002-12-24

    申请号:US09909710

    申请日:2001-07-19

    IPC分类号: B41F154

    CPC分类号: B41J11/009 B41J11/0095

    摘要: A printer having a transparency film discrimination system is disclosed. The printer includes a feed mechanism, an illumination source, a detector, and a processor. Light from the illumination source is reflected on or transmitting through the print medium (such as a transparent film) and is detected by the detector. The detected light is analyzed to determine the type of the medium. If the determined type of the print medium is not acceptable for the printer, then control signal is provided to the printer to halt the printing process as to avoid damage to the printer.

    摘要翻译: 公开了一种具有透明胶片鉴别系统的打印机。 打印机包括进给机构,照明源,检测器和处理器。 来自照明源的光被反射在打印介质(例如透明膜)上或通过打印介质传输,并由检测器检测。 分析检测到的光以确定介质的类型。 如果确定的打印介质的类型对于打印机是不可接受的,则将控制信号提供给打印机以停止打印处理,以避免损坏打印机。