- 专利标题: Capacitance type acceleration sensor
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申请号: US11265281申请日: 2005-11-03
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公开(公告)号: US20060053890A1公开(公告)日: 2006-03-16
- 发明人: Kazuhiko Kano , Tetsuo Yoshioka , Takao Iwaki , Yukihiro Takeuchi
- 申请人: Kazuhiko Kano , Tetsuo Yoshioka , Takao Iwaki , Yukihiro Takeuchi
- 优先权: JP2002-336802 20021120
- 主分类号: G01P15/125
- IPC分类号: G01P15/125
摘要:
A capacitance type acceleration sensor includes a semiconductor substrate, a weight portion supported with the substrate through a spring portion, a movable electrode integrated with the weight portion, and a fixed electrode cantilevered with the substrate. The movable electrode is displaced along with a facing surface of the movable electrode in accordance with acceleration. The facing surface of the movable electrode faces a facing surface of the fixed electrode so as to provide a capacitor. The capacitance of the capacitor changes in accordance with a displacement of the movable electrode so that an outer circuit detects the acceleration as a capacitance change. Each facing surface of the movable and fixed electrodes has a concavity and convexity portion for increasing the capacitance change.
公开/授权文献
- US07107846B2 Capacitance type acceleration sensor 公开/授权日:2006-09-19