发明申请
- 专利标题: Methods for enhancing die saw and packaging reliability
- 专利标题(中): 增加模具锯和包装可靠性的方法
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申请号: US11196184申请日: 2005-08-03
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公开(公告)号: US20060055002A1公开(公告)日: 2006-03-16
- 发明人: Chih-Hsiang Yao , Wen-Kai Wan , Kuan-Shou Chi , Chih-Cherng Jeng , Ming-Shuo Liang , Tai-Chun Huang , Chin-Chiu Hsia , Mong-Song Liang
- 申请人: Chih-Hsiang Yao , Wen-Kai Wan , Kuan-Shou Chi , Chih-Cherng Jeng , Ming-Shuo Liang , Tai-Chun Huang , Chin-Chiu Hsia , Mong-Song Liang
- 专利权人: Taiwan Semiconductor Manufacturing Co.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co.
- 主分类号: H01L23/544
- IPC分类号: H01L23/544 ; H01L21/30
摘要:
A wafer device is disclosed for improving reliability of circuits fabricated in an active area on a silicon substrate. A seal ring is fabricated around the active area, and a shallow trench isolation is also formed between the seal ring and a scribe line by etching into a portion of the silicon substrate, wherein the seal ring and the shallow trench isolation prevent die saw induced crack from propagating to the active area when the active area is cut along the scribe line.
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