Invention Application
US20060056001A1 Aggregate of electronic device chips, electronic device chip, aggregate of diffraction grating light modulators, and diffraction grating light modulator 失效
电子器件芯片,电子器件芯片,衍射光栅光调制器的聚集体和衍射光栅光调制器的集合体

  • Patent Title: Aggregate of electronic device chips, electronic device chip, aggregate of diffraction grating light modulators, and diffraction grating light modulator
  • Patent Title (中): 电子器件芯片,电子器件芯片,衍射光栅光调制器的聚集体和衍射光栅光调制器的集合体
  • Application No.: US11208190
    Application Date: 2005-08-18
  • Publication No.: US20060056001A1
    Publication Date: 2006-03-16
  • Inventor: Ayumu TaguchiMasato NishidaYasuyuki ItoHitoshi Tamada
  • Applicant: Ayumu TaguchiMasato NishidaYasuyuki ItoHitoshi Tamada
  • Priority: JPP2004-255083 20040902
  • Main IPC: G02F1/03
  • IPC: G02F1/03
Aggregate of electronic device chips, electronic device chip, aggregate of diffraction grating light modulators, and diffraction grating light modulator
Abstract:
A diffraction grating light modulator composed of a plurality of diffraction grating light modulating elements formed on a substrate, each consisting of a lower electrode, belt-like fixed electrodes and movable electrodes supported above the lower electrode, and exposed connecting terminals (for electrical connection to external circuits) electrically connected to the movable electrodes, the fixed electrodes and the movable electrodes constituting a diffraction grating upon application of a voltage to the lower electrode, the diffraction grating light modulator having a protective electrode surrounding the connecting terminals, so that the diffraction grating light modulating element is certainly protected from damage by static electricity.
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