- 专利标题： Micromirror device and method for making the same
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申请号： US11056727申请日： 2005-02-11
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公开(公告)号： US20060056005A1公开(公告)日： 2006-03-16
- 发明人: Satyadev Patel , Andrew Huibers , Jonathan Doan , James Dunphy , Dmitri Simonian , Hongqin Shi , Jianglong Zhang
- 申请人： Satyadev Patel , Andrew Huibers , Jonathan Doan , James Dunphy , Dmitri Simonian , Hongqin Shi , Jianglong Zhang
- 主分类号： G02B26/00
- IPC分类号： G02B26/00
摘要：
Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.
公开/授权文献
- US07119944B2 Micromirror device and method for making the same 公开/授权日：2006-10-10
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