Invention Application
- Patent Title: Micromirror device and method for making the same
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Application No.: US11056727Application Date: 2005-02-11
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Publication No.: US20060056005A1Publication Date: 2006-03-16
- Inventor: Satyadev Patel , Andrew Huibers , Jonathan Doan , James Dunphy , Dmitri Simonian , Hongqin Shi , Jianglong Zhang
- Applicant: Satyadev Patel , Andrew Huibers , Jonathan Doan , James Dunphy , Dmitri Simonian , Hongqin Shi , Jianglong Zhang
- Main IPC: G02B26/00
- IPC: G02B26/00
Abstract:
Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.
Public/Granted literature
- US07119944B2 Micromirror device and method for making the same Public/Granted day:2006-10-10
Information query
