Invention Application
- Patent Title: Micromirror devices with in-plane deformable hinge
- Patent Title (中): 具有平面可变形铰链的微镜器件
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Application No.: US11056732Application Date: 2005-02-11
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Publication No.: US20060056006A1Publication Date: 2006-03-16
- Inventor: Andrew Huibers , Satyadev Patel , Jonathan Doan , James Dunphy , Dmitri Simonian , Hongqin Shi , Jianglong Zhang
- Applicant: Andrew Huibers , Satyadev Patel , Jonathan Doan , James Dunphy , Dmitri Simonian , Hongqin Shi , Jianglong Zhang
- Main IPC: G02B26/00
- IPC: G02B26/00
Abstract:
Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.
Public/Granted literature
- US07215459B2 Micromirror devices with in-plane deformable hinge Public/Granted day:2007-05-08
Information query
