Invention Application
US20060056006A1 Micromirror devices with in-plane deformable hinge 有权
具有平面可变形铰链的微镜器件

Micromirror devices with in-plane deformable hinge
Abstract:
Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.
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