发明申请
US20060062698A1 MEMS actuator and method of manufacture for MEMS particle sorting device
有权
MEMS致动器及MEMS粒子分选装置的制造方法
- 专利标题: MEMS actuator and method of manufacture for MEMS particle sorting device
- 专利标题(中): MEMS致动器及MEMS粒子分选装置的制造方法
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申请号: US11260367申请日: 2005-10-28
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公开(公告)号: US20060062698A1公开(公告)日: 2006-03-23
- 发明人: John Foster , John Harley , Steven Hovey , Richard Martin , Hung Nguyen , Paul Rubel
- 申请人: John Foster , John Harley , Steven Hovey , Richard Martin , Hung Nguyen , Paul Rubel
- 申请人地址: US CA Goleta
- 专利权人: Innovative Micro Technology
- 当前专利权人: Innovative Micro Technology
- 当前专利权人地址: US CA Goleta
- 主分类号: B01L3/00
- IPC分类号: B01L3/00
摘要:
A micromechanical particle sorting chip uses an actuator divided into two parts to direct a component of interest into one of a plurality of possible exit paths, based on detection of a fluorescent signal emanating from the component of interest. The two-part actuator may include a force-generating portion and a microactuator portion. The microactuator portion may be disposable, whereas the force-generating portion may be reuseable. By bringing the force-generating portion into proximity to the microactuator portion, the microactuator is induced to move, thereby separating the component of interest from the rest of the fluid stream. The force-generating portion and the microactuator portion may be optimized and fabricated separately, thereby leading to faster, more reliable and less expensive particle sorting.
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