发明申请
- 专利标题: Method for producing liquid-jet head
- 专利标题(中): 喷液头的制造方法
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申请号: US11234266申请日: 2005-09-26
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公开(公告)号: US20060064873A1公开(公告)日: 2006-03-30
- 发明人: Akira Matsuzawa , Mutsuhiko Ota
- 申请人: Akira Matsuzawa , Mutsuhiko Ota
- 专利权人: SEIKO EPSON CORPORATION
- 当前专利权人: SEIKO EPSON CORPORATION
- 优先权: JP2004-280398 20040927
- 主分类号: B21D53/76
- IPC分类号: B21D53/76
摘要:
A method for producing a liquid-jet head comprises the steps of: forming a vibration plate and piezoelectric elements on one surface of a passage-forming substrate, and removing the vibration plate in a region to be a communicating portion, thereby forming an exposed portion; forming a wiring layer on the passage-forming substrate within the exposed portion, and forming lead electrodes; bonding a reservoir forming plate to the one surface of the passage-forming substrate; wet-etching the passage-forming substrate at the other surface thereof to form pressure generating chambers and the communicating portion; forming a liquid-resistant protective film on inner surfaces of the pressure generating chambers and the communicating portion; removing the protective film within the exposed portion; and performing wet etching on the communicating portion side to remove the wiring layer, thereby establishing communication between a reservoir portion and the communicating portion.
公开/授权文献
- US07402256B2 Method for producing liquid-jet head 公开/授权日:2008-07-22
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