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公开(公告)号：US07571525B2
公开(公告)日：2009-08-11
申请号：US11392668
申请日：2006-03-30
申请人： Akira Matsuzawa , Mutsuhiko Ota
发明人： Akira Matsuzawa , Mutsuhiko Ota
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1629 , B41J2002/14241 , B41J2002/14491 , Y10T29/42 , Y10T29/49401
摘要： Included are the steps of: forming piezoelectric elements on a surface of a passage-forming substrate with a vibration plate in between, and forming a penetrating portion by removing an area in the vibration plate, which area will serve as a communicating portion; forming lead electrodes and sealing up the penetrating portion with an interconnect layer; joining a reservoir forming plate to a surface of a passage-forming substrate; forming liquid passages by wet-etching; forming protection films on inner surfaces of the liquid passages; detaching and removing a protection film on an interconnect layer; and causing a reservoir portion and a communicating portion to communicate with each other by removing a corresponding part of the interconnect layer, and in accordance with the manufacturing method, while the liquid passages are being formed, the communicating portion is formed in a way that an edge of an opening of the vibration plate is located outside an edge of an opening which is close to the penetrating portion, and in a way that at least the edge of the opening of the penetrating portion is thus configured of only any one of the vibration plate and the interconnect layer.
摘要翻译： 包括以下步骤：在通道形成基板的表面上形成压电元件，其间具有振动板，并且通过去除振动板中的区域形成穿透部分，该区域将用作连通部分; 形成引线电极并用互连层密封穿透部分; 将储层形成板连接到通道形成基板的表面; 通过湿法蚀刻形成液体通道; 在液体通道的内表面上形成保护膜; 在互连层上分离和去除保护膜; 并且通过除去互连层的对应部分而使储存部和连通部彼此连通，并且根据制造方法，在形成液体通道的同时，形成连通部， 振动板的开口的边缘位于靠近穿透部分的开口的边缘的外侧，并且以至少穿透部分的开口的边缘仅由振动的任何一个构成 板和互连层。
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公开(公告)号：US07318277B2
公开(公告)日：2008-01-15
申请号：US11133469
申请日：2005-05-20
CPC分类号： B41J2/1623 , B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1639 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491 , Y10T29/42 , Y10T29/49128 , Y10T29/4913 , Y10T29/49147 , Y10T29/49151 , Y10T29/49401
摘要： A method of manufacturing a liquid jet head includes the steps of: forming a piezoelectric element on one plane of a passage-forming substrate with a vibration plate interposed therebetween, and removing the vibration plate in an area where a communicating portion is formed, thus forming a penetrated hole; forming a predetermined metal layer on the one plane of the passage-forming substrate on which the piezoelectric element is formed to seal the penetrated hole with the metal layer, and patterning the metal layer in an area corresponding to the piezoelectric element, thus forming a lead electrode; adhering a reservoir-forming plate, in which a reservoir portion is formed, to the one plane of the passage-forming substrate; wet-etching the passage-forming substrate from the other plane thereof until the vibration plate and the metal layer are exposed, thus forming a pressure generating chamber and the communicating portion; and removing the metal layer by etching to allow the reservoir portion and the communicating portion to communicate with each other.
摘要翻译： 一种制造液体喷射头的方法包括以下步骤：在通道形成基板的一个平面上形成压电元件，其间插入有振动板，并且在形成连通部的区域中移除振动板，从而形成 穿孔; 在其上形成有压电元件的通道形成基板的一个平面上形成预定的金属层，以与金属层密封穿透的孔，并且在与压电元件相对应的区域中图案化金属层，从而形成引线 电极; 将其中形成有储存部的储存器形成板粘附到通道形成基板的一个平面; 从通道形成基板的另一面湿式蚀刻直到振动板和金属层露出，从而形成压力产生室和连通部分; 以及通过蚀刻去除所述金属层，以允许所述储存部分和所述连通部分彼此连通。
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公开(公告)号：US20060250456A1
公开(公告)日：2006-11-09
申请号：US11392668
申请日：2006-03-30
申请人： Akira Matsuzawa , Mutsuhiko Ota
发明人： Akira Matsuzawa , Mutsuhiko Ota
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1629 , B41J2002/14241 , B41J2002/14491 , Y10T29/42 , Y10T29/49401
摘要： Included are the steps of: forming piezoelectric elements on a surface of a passage-forming substrate with a vibration plate in between, and forming a penetrating portion by removing an area in the vibration plate, which area will serve as a communicating portion; forming lead electrodes and sealing up the penetrating portion with an interconnect layer; joining a reservoir forming plate to a surface of a passage-forming substrate; forming liquid passages by wet-etching; forming protection films on inner surfaces of the liquid passages; detaching and removing a protection film on an interconnect layer; and causing a reservoir portion and a communicating portion to communicate with each other by removing a corresponding part of the interconnect layer, and in accordance with the manufacturing method, while the liquid passages are being formed, the communicating portion is formed in a way that an edge of an opening of the vibration plate is located outside an edge of an opening which is close to the penetrating portion, and in a way that at least the edge of the opening of the penetrating portion is thus configured of only any one of the vibration plate and the interconnect layer.
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公开(公告)号：US08061813B2
公开(公告)日：2011-11-22
申请号：US11854359
申请日：2007-09-12
IPC分类号： B41J2/05
CPC分类号： B41J2/14233 , B41J2/045 , B41J2202/11
摘要： A liquid ejecting head that includes a fluid channel formation substrate and pressure generation units. The fluid channel formation substrate is made of a silicon single crystal substrate having a crystal face orientation of. The fluid channel formation substrate has a plurality of separate flow channels that include at least pressure generation chambers demarcated by partition walls, each of the pressure generation chambers being in communication with a nozzle opening that ejects liquid drops. The fluid channel formation substrate further has a communication portion that is in communication with each of the separate flow channels. The pressure generation units are provided so as to correspond to the pressure generation chambers and generate a pressure change in the pressure generation chambers so as to cause ejection of liquid drops.
摘要翻译： 一种液体喷射头，其包括流体通道形成基板和压力产生单元。 流体通道形成基板由具有晶面取向的硅单晶基板制成。 流体通道形成基板具有多个单独的流动通道，至少包括通过分隔壁划分的压力产生室，每个压力产生室与喷射液滴的喷嘴开口连通。 流体通道形成基板还具有与每个分离的流动通道连通的通信部分。 压力发生单元设置成对应于压力产生室，并且在压力产生室中产生压力变化，从而引起液滴喷射。
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公开(公告)号：US20050262691A1
公开(公告)日：2005-12-01
申请号：US11133469
申请日：2005-05-20
CPC分类号： B41J2/1623 , B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1639 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491 , Y10T29/42 , Y10T29/49128 , Y10T29/4913 , Y10T29/49147 , Y10T29/49151 , Y10T29/49401
摘要： A method of manufacturing a liquid jet head includes the steps of: forming a piezoelectric element on one plane of a passage-forming substrate with a vibration plate interposed therebetween, and removing the vibration plate in an area where a communicating portion is formed, thus forming a penetrated hole; forming a predetermined metal layer on the one plane of the passage-forming substrate on which the piezoelectric element is formed to seal the penetrated hole with the metal layer, and patterning the metal layer in an area corresponding to the piezoelectric element, thus forming a lead electrode; adhering a reservoir-forming plate, in which a reservoir portion is formed, to the one plane of the passage-forming substrate; wet-etching the passage-forming substrate from the other plane thereof until the vibration plate and the metal layer are exposed, thus forming a pressure generating chamber and the communicating portion; and removing the metal layer by etching to allow the reservoir portion and the communicating portion to communicate with each other.
摘要翻译： 一种制造液体喷射头的方法包括以下步骤：在通道形成基板的一个平面上形成压电元件，其间插入有振动板，并且在形成连通部的区域中移除振动板，从而形成 穿孔; 在其上形成有压电元件的通道形成基板的一个平面上形成预定的金属层，以与金属层密封穿透的孔，并且在与压电元件相对应的区域中图案化金属层，从而形成引线 电极; 将其中形成有储存部的储存器形成板粘附到通道形成基板的一个平面; 从通道形成基板的另一面湿式蚀刻直到振动板和金属层露出，从而形成压力产生室和连通部分; 以及通过蚀刻去除所述金属层，以允许所述储存部分和所述连通部分彼此连通。
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公开(公告)号：US08342656B2
公开(公告)日：2013-01-01
申请号：US13299693
申请日：2011-11-18
CPC分类号： B41J2/14233 , B41J2/045 , B41J2202/11
摘要： A liquid ejecting head that includes a fluid channel formation substrate and pressure generation units. The fluid channel formation substrate is made of a silicon single crystal substrate having a crystal face orientation of. The fluid channel formation substrate has a plurality of separate flow channels that include at least pressure generation chambers demarcated by partition walls, each of the pressure generation chambers being in communication with a nozzle opening that ejects liquid drops. The fluid channel formation substrate further has a communication portion that is in communication with each of the separate flow channels. The pressure generation units are provided so as to correspond to the pressure generation chambers and generate a pressure change in the pressure generation chambers so as to cause ejection of liquid drops.
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公开(公告)号：US07402256B2
公开(公告)日：2008-07-22
申请号：US11234266
申请日：2005-09-26
申请人： Akira Matsuzawa , Mutsuhiko Ota
发明人： Akira Matsuzawa , Mutsuhiko Ota
CPC分类号： B41J2/1631 , B41J2/161 , B41J2/1629 , B41J2002/14241 , B41J2002/14491 , Y10T29/49401
摘要： A method for producing a liquid-jet head comprises the steps of: forming a vibration plate and piezoelectric elements on one surface of a passage-forming substrate, and removing the vibration plate in a region to be a communicating portion, thereby forming an exposed portion; forming a wiring layer on the passage-forming substrate within the exposed portion, and forming lead electrodes; bonding a reservoir forming plate to the one surface of the passage-forming substrate; wet-etching the passage-forming substrate at the other surface thereof to form pressure generating chambers and the communicating portion; forming a liquid-resistant protective film on inner surfaces of the pressure generating chambers and the communicating portion; removing the protective film within the exposed portion; and performing wet etching on the communicating portion side to remove the wiring layer, thereby establishing communication between a reservoir portion and the communicating portion.
摘要翻译： 一种液体喷射头的制造方法，其特征在于，在通路形成基板的一个面上形成振动板和压电元件，在作为连通部的区域中除去振动板，形成露出部 ; 在曝光部分内的通道形成基板上形成布线层，形成引线电极; 将储存器形成板结合到通道形成基板的一个表面; 在其另一个表面湿法蚀刻通道形成基板以形成压力产生室和连通部分; 在压力发生室和连通部的内表面上形成耐液体保护膜; 去除暴露部分内的保护膜; 在连通部侧进行湿式蚀刻，除去配线层，从而建立储存部与通气部之间的连通。
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公开(公告)号：US20060064873A1
公开(公告)日：2006-03-30
申请号：US11234266
申请日：2005-09-26
申请人： Akira Matsuzawa , Mutsuhiko Ota
发明人： Akira Matsuzawa , Mutsuhiko Ota
IPC分类号： B21D53/76
CPC分类号： B41J2/1631 , B41J2/161 , B41J2/1629 , B41J2002/14241 , B41J2002/14491 , Y10T29/49401
摘要： A method for producing a liquid-jet head comprises the steps of: forming a vibration plate and piezoelectric elements on one surface of a passage-forming substrate, and removing the vibration plate in a region to be a communicating portion, thereby forming an exposed portion; forming a wiring layer on the passage-forming substrate within the exposed portion, and forming lead electrodes; bonding a reservoir forming plate to the one surface of the passage-forming substrate; wet-etching the passage-forming substrate at the other surface thereof to form pressure generating chambers and the communicating portion; forming a liquid-resistant protective film on inner surfaces of the pressure generating chambers and the communicating portion; removing the protective film within the exposed portion; and performing wet etching on the communicating portion side to remove the wiring layer, thereby establishing communication between a reservoir portion and the communicating portion.
摘要翻译： 一种液体喷射头的制造方法，其特征在于，在通路形成基板的一个面上形成振动板和压电元件，在作为连通部的区域中除去振动板，形成露出部 ; 在曝光部分内的通道形成基板上形成布线层，形成引线电极; 将储存器形成板结合到通道形成基板的一个表面; 在其另一个表面湿法蚀刻通道形成基板以形成压力产生室和连通部分; 在压力发生室和连通部的内表面上形成耐液体保护膜; 去除暴露部分内的保护膜; 在连通部侧进行湿式蚀刻，除去配线层，从而建立储存部与通气部之间的连通。
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公开(公告)号：US08971389B2
公开(公告)日：2015-03-03
申请号：US13985657
申请日：2011-02-17
申请人： Kenichi Okada , Akira Matsuzawa
发明人： Kenichi Okada , Akira Matsuzawa
CPC分类号： H04L25/08 , H03B5/1212 , H03B5/1228 , H03B5/1253 , H03B27/00 , H03L7/24 , H04B1/40
摘要： Provided is a millimeter wavelength range transceiver device which can improve phase noise characteristics and which can also independently calibrate each respective local oscillator of a transmission unit and a reception unit. This millimeter wavelength range transceiver device comprises a transmission unit (10), a reception unit (20), and a reference frequency signal generator (30). The transmission unit (10) comprises a transmission-use local oscillator (11) comprising an injection-locked oscillator, a transmission-use mixer (12) for mixing the signal from the transmission-use local oscillator and a transmission baseband signal, and a transmission-use amplifier (13) for amplifying the signal from the transmission-use mixer to a transmission-use antenna (15). The reception unit (20) comprises a reception-use amplifier (25) for amplifying a signal from a reception-use antenna (24), a reception-use local oscillator (22) comprising an injection-locked oscillator, and a reception-use mixer (23) for mixing the signal from the reception-use local oscillator and the signal from the reception-use amplifier in order to output a reception baseband signal. A reference frequency signal generator (30) injects a reference frequency signal into the transmission-and-reception-use local oscillators (11 and 22).
摘要翻译： 提供了一种毫米波长范围收发器装置，其可以改善相位噪声特性，并且还可以独立地校准发送单元和接收单元的每个相应的本地振荡器。 该毫米波长范围的收发器装置包括传输单元（10），接收单元（20）和参考频率信号发生器（30）。 发送单元（10）包括：发送用本地振荡器（11），包括注入锁定振荡器，用于混合来自发送用本地振荡器的信号和发送基带信号的发送使用混合器（12） 传输用放大器（13），用于将来自传输用混合器的信号放大到传输用天线（15）。 接收单元（20）包括用于放大来自接收用天线（24）的信号的接收用放大器（25），包括注入锁定振荡器的接收用本地振荡器（22）和接收使用天线 混合器（23），用于混合来自接收用本地振荡器的信号和来自接收用放大器的信号，以输出接收基带信号。 参考频率信号发生器（30）将参考频率信号注入到发送和接收用的本地振荡器（11和22）中。
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公开(公告)号：US07696918B2
公开(公告)日：2010-04-13
申请号：US12176420
申请日：2008-07-21
IPC分类号： H03M1/38
摘要： Provided is a successive approximation AD conversion apparatus that outputs digital output data corresponding to an analog input signal, including a bit selecting section that selects a conversion target bit sequentially from a highest bit of the output data; a data control section that outputs comparison data determining a value of the conversion target bit, each time a conversion target bit is selected; a DA conversing section that outputs an analog comparison signal corresponding to the comparison data; a comparing section that outputs a comparison result between the input signal and the comparison signal, upon the output of the comparison signal by the DA converting section, and that is reset after outputting the comparison result; a completion detecting section that, upon detecting that the comparing section has output the comparison result, outputs a completion signal causing the bit selecting section to select a next conversion target bit, prior to the comparing section being reset; and an output section that outputs output data in which a value of each bit is based on the comparison result by the comparing section.
摘要翻译： 提供了一种逐次逼近AD转换装置，其输出与模拟输入信号相对应的数字输出数据，包括从输出数据的最高位依次选择转换目标位的位选择部分; 数据控制部，每当选择转换目标位时，输出确定转换目标位的值的比较数据; DA转换部，其输出与比较数据对应的模拟比较信号; 比较部，其输出比较信号与比较信号之间的比较结果，在DA变换部输出比较信号后，输出比较结果后进行复位; 完成检测部分，在比较部分已经输出比较结果之后，在比较部分被复位之前，输出使比特选择部分选择下一个转换目标比特的完成信号; 以及输出部，其输出其中每个比特的值基于比较部分的比较结果的输出数据。
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