发明申请
US20060067656A1 Micromechanically manufactured infrared transmitter 审中-公开
微机械制造的红外发射器

Micromechanically manufactured infrared transmitter
摘要:
A micromechanical infrared radiator has a radiator surface supported in a carrier chip. The radiator surface can be heated by a heating device. As a function of a temperature measurement, the heating power can be controlled such that the radiator surface assumes a defined temperature. For direct temperature measurement, a micromechanical temperature sensor in the form of a metal resistance is integrated in the radiator surface.
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