发明申请
- 专利标题: METHOD FOR FABRICATING ELECTRICAL INTERCONNECT STRUCTURE
- 专利标题(中): 电气互连结构的制作方法
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申请号: US10905931申请日: 2005-01-27
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公开(公告)号: US20060068577A1公开(公告)日: 2006-03-30
- 发明人: Shao-Chien Lee , Tzyy Jang Tseng , Chang-Ming Lee
- 申请人: Shao-Chien Lee , Tzyy Jang Tseng , Chang-Ming Lee
- 优先权: TW93129344 20040929
- 主分类号: H01L21/44
- IPC分类号: H01L21/44
摘要:
A method for fabricating an electrical interconnect structure is adapted for a circuit board manufacturing process. The circuit board comprises a conductive substrate, which comprises a first conductive layer and a bump conductive layer. The bump conductive layer is patterned to form at least one bump over the first conductive layer. Then, a dielectric layer is formed over the first conductive layer and the bump. A second conductive layer is formed over the dielectric layer. At least one blind hole is formed in the second conductive layer and the dielectric layer, passing through the second conductive layer and the dielectric layer to expose the top surface of the bump. A conductive material is filled in the blind hole, and the conductive material in the blind hole and the bump constitute a conductive post.
公开/授权文献
- US07393720B2 Method for fabricating electrical interconnect structure 公开/授权日:2008-07-01
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