- 专利标题: Apparatus for positioning an optical element in a structure
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申请号: US11262360申请日: 2005-10-28
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公开(公告)号: US20060072217A1公开(公告)日: 2006-04-06
- 发明人: Ulrich Weber , Hubert Holderer , Dirk Rexhaeuser
- 申请人: Ulrich Weber , Hubert Holderer , Dirk Rexhaeuser
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT AG
- 当前专利权人: Carl Zeiss SMT AG
- 当前专利权人地址: DE Oberkochen
- 优先权: DE10226655.7 20020614
- 主分类号: G02B7/02
- IPC分类号: G02B7/02
摘要:
In an apparatus for positioning an optical element in a structure, particularly in an objective housing of a projection objective for microlithography, the optical element is connected to the structure via fastening elements. The position of the optical element is set by means of adjusting fasteners. The fastening elements are arranged in such a way and the adjusting fasteners can be actuated in such a way that the optical element can be tilted about three mutually independent axes and can additionally be displaced in a translatory fashion in one axial direction
公开/授权文献
- US07251086B2 Apparatus for positioning an optical element in a structure 公开/授权日:2007-07-31
信息查询
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |
G02B7/02 | .用于透镜 |