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公开(公告)号：US20060072217A1
公开(公告)日：2006-04-06
申请号：US11262360
申请日：2005-10-28
申请人： Ulrich Weber , Hubert Holderer , Dirk Rexhaeuser
发明人： Ulrich Weber , Hubert Holderer , Dirk Rexhaeuser
IPC分类号： G02B7/02
CPC分类号： G03F7/70258 , G02B7/003 , G03F7/70825
摘要： In an apparatus for positioning an optical element in a structure, particularly in an objective housing of a projection objective for microlithography, the optical element is connected to the structure via fastening elements. The position of the optical element is set by means of adjusting fasteners. The fastening elements are arranged in such a way and the adjusting fasteners can be actuated in such a way that the optical element can be tilted about three mutually independent axes and can additionally be displaced in a translatory fashion in one axial direction
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公开(公告)号：US07251086B2
公开(公告)日：2007-07-31
申请号：US11262360
申请日：2005-10-28
申请人： Ulrich Weber , Hubert Holderer , Dirk Rexhaeuser
发明人： Ulrich Weber , Hubert Holderer , Dirk Rexhaeuser
IPC分类号： G02B7/02
CPC分类号： G03F7/70258 , G02B7/003 , G03F7/70825
摘要： In an apparatus for positioning an optical element in a structure, particularly in an objective housing of a projection objective for microlithography, the optical element is connected to the structure via fastening elements. The position of the optical element is set by means of adjusting fasteners. The fastening elements are arranged in such a way and the adjusting fasteners can be actuated in such a way that the optical element can be tilted about three mutually independent axes and can additionally be displaced in a translatory fashion in one axial direction.
摘要翻译： 在用于将光学元件定位在结构中的装置中，特别是在用于微光刻的投影物镜的物镜外壳中，光学元件通过紧固元件连接到结构。 光学元件的位置通过调整紧固件来设定。 紧固元件以这种方式布置，并且调节紧固件可以以这样的方式致动，使得光学元件可以围绕三个相互独立的轴线倾斜，并且可以在一个轴向方向上以平移方式另外移位。
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公开(公告)号：US06967792B2
公开(公告)日：2005-11-22
申请号：US10458968
申请日：2003-06-11
申请人： Ulrich Weber , Hubert Holderer , Dirk Rexhaeuser
发明人： Ulrich Weber , Hubert Holderer , Dirk Rexhaeuser
IPC分类号： G02B7/18 , G02B7/00 , G03F7/20 , H01L21/027 , G02B7/02
CPC分类号： G03F7/70258 , G02B7/003 , G03F7/70825
摘要： In an apparatus for positioning an optical element in a structure, particularly in an objective housing of a projection objective for microlithography, the optical element is connected to the structure via fastening elements. The position of the optical element is set by means of adjusting fasteners. The fastening elements are arranged in such a way and the adjusting fasteners can be actuated in such a way that the optical element can be tilted about three mutually independent axes and can additionally be displaced in a translatory fashion in one axial direction.
摘要翻译： 在用于将光学元件定位在结构中的装置中，特别是在用于微光刻的投影物镜的物镜外壳中，光学元件通过紧固元件连接到结构。 光学元件的位置通过调整紧固件来设定。 紧固元件以这种方式布置，并且调节紧固件可以以这样的方式致动，使得光学元件可以围绕三个相互独立的轴线倾斜，并且可以在一个轴向方向上以平移方式另外移位。
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公开(公告)号：US07400460B2
公开(公告)日：2008-07-15
申请号：US10599784
申请日：2005-04-16
IPC分类号： G02B7/02
CPC分类号： G02B7/021 , G02B13/143 , G03F7/70341 , G03F7/70808 , G03F7/70825
摘要： The invention relates to a method for connection of an optical element to a mount structure, whereby in a first step the optical element is connected to the mount structure and in a second step the optical element is welded to the mount structure in the region of the connection.
摘要翻译： 本发明涉及一种用于将光学元件连接到安装结构的方法，由此在第一步骤中，光学元件连接到安装结构，并且在第二步骤中，光学元件在该区域中被焊接到安装结构 连接。
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公开(公告)号：US20070171552A1
公开(公告)日：2007-07-26
申请号：US10599784
申请日：2005-04-16
IPC分类号： G02B7/02
CPC分类号： G02B7/021 , G02B13/143 , G03F7/70341 , G03F7/70808 , G03F7/70825
摘要： The invention relates to a method for connection of an optical element to a mount structure, whereby in a first step the optical element is connected to the mount structure and in a second step the optical element is welded to the mount structure in the region of the connection.
摘要翻译： 本发明涉及一种用于将光学元件连接到安装结构的方法，由此在第一步骤中，光学元件连接到安装结构，并且在第二步骤中，光学元件在该区域中被焊接到安装结构 连接。
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