Invention Application
US20060075366A1 Test structures for feature fidelity improvement 失效
测试结构,提高了功能的保真度

Test structures for feature fidelity improvement
Abstract:
Systems and techniques for generating test structures. The test structures may conform to a set of design rules for a portion of an integrated circuit design. The test structures may include base figures, which may be in an enriched environment. For example, the test structures may include one or more additional figures such as surrounding figures, external figures, and/or symmetric figures. A correction algorithm for correcting a layout may be checked using a plurality of the test structures.
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