Invention Application
- Patent Title: Alignment-tolerant lens structures for acoustic force actuation of cantilevers
-
Application No.: US11237184Application Date: 2005-09-28
-
Publication No.: US20060075807A1Publication Date: 2006-04-13
- Inventor: Scott Elrod
- Applicant: Scott Elrod
- Assignee: PALO ALTO RESEARCH CENTER INCORPORATED
- Current Assignee: PALO ALTO RESEARCH CENTER INCORPORATED
- Main IPC: G01B11/30
- IPC: G01B11/30

Abstract:
In accordance with one aspect of the present invention, a cantilever of a probe-based instrument is deflected by directing a beam of ultrasonic acoustic energy at the cantilever to apply acoustic radiation pressure to the cantilever. The energy is generated by an acoustic actuator. The transmitted beam preferably is focused using a cylindrical lens, providing a beam tightly focused in one dimension and unfocused in a second dimension. In accordance with another aspect of the present invention, a power source such as an RF signal generator is operated so as to spread the spectrum of acoustic radiation on a time scale that is short or comparable to the acoustic roundtrip time. Such a design diminishing the resonance effects and sensitivity to spacing between the cantilever and the acoustic source.
Public/Granted literature
- US07467542B2 Alignment-tolerant lens structures for acoustic force actuation of cantilevers Public/Granted day:2008-12-23
Information query