Invention Application
US20060076595A1 DYNAMIC RANDOM ACCESS MEMORY CELL AND FABRICATING METHOD THEREOF
失效
动态随机访问存储单元及其制作方法
- Patent Title: DYNAMIC RANDOM ACCESS MEMORY CELL AND FABRICATING METHOD THEREOF
- Patent Title (中): 动态随机访问存储单元及其制作方法
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Application No.: US11163600Application Date: 2005-10-25
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Publication No.: US20060076595A1Publication Date: 2006-04-13
- Inventor: Hsiao-Che Wu
- Applicant: Hsiao-Che Wu
- Main IPC: H01L29/94
- IPC: H01L29/94

Abstract:
A method of fabricating a dynamic random access memory cell is provided. A substrate having a patterned mask layer thereon and a deep trench therein is provided. The patterned mask layer exposes the deep trench. A deep trench capacitor is formed inside the deep trench. Thereafter, a trench is formed in the substrate on one side of the deep trench capacitor. The trench exposes a portion of the upper electrode of the deep trench capacitor and a portion of the substrate. After that, a semiconductor strip is formed in the trench. A gate dielectric layer is formed over the substrate to cover the exposed semiconductor strip and the substrate. A gate is formed over the gate dielectric layer such that the gate and the semiconductor strip crosses over each other, and the gate-covered portion of the semiconductor strip serves as a channel region.
Public/Granted literature
- US07276753B2 Dynamic random access memory cell and fabricating method thereof Public/Granted day:2007-10-02
Information query
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