发明申请
US20060076947A1 Micro-electromechanical system (MEMS) based current & magnetic field sensor having improved sensitivities 有权
基于微机电系统(MEMS)的电流和磁场传感器具有改进的灵敏度

Micro-electromechanical system (MEMS) based current & magnetic field sensor having improved sensitivities
摘要:
A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component a structural component comprising a silicon substrate and a compliant layer comprising a material selected from the group consisting of silicon dioxide and silicon nitride, a magnetic-to-mechanical converter coupled to the structural component to provide a mechanical indication of the magnetic field, and a strain responsive component coupled to the structural component to sense the mechanical indication and to provide an indication of the current in the current carrying conductor in response thereto.
信息查询
0/0