发明申请
US20060076947A1 Micro-electromechanical system (MEMS) based current & magnetic field sensor having improved sensitivities
有权
基于微机电系统(MEMS)的电流和磁场传感器具有改进的灵敏度
- 专利标题: Micro-electromechanical system (MEMS) based current & magnetic field sensor having improved sensitivities
- 专利标题(中): 基于微机电系统(MEMS)的电流和磁场传感器具有改进的灵敏度
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申请号: US11289910申请日: 2005-11-30
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公开(公告)号: US20060076947A1公开(公告)日: 2006-04-13
- 发明人: Ertugrul Berkcan , Shankar Chandrasekaran , Christopher Kapusta , Laura Meyer , Glenn Claydon , Debbie Jones , Anis Zribi
- 申请人: Ertugrul Berkcan , Shankar Chandrasekaran , Christopher Kapusta , Laura Meyer , Glenn Claydon , Debbie Jones , Anis Zribi
- 专利权人: General Electric Company
- 当前专利权人: General Electric Company
- 主分类号: G01R1/20
- IPC分类号: G01R1/20
摘要:
A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component a structural component comprising a silicon substrate and a compliant layer comprising a material selected from the group consisting of silicon dioxide and silicon nitride, a magnetic-to-mechanical converter coupled to the structural component to provide a mechanical indication of the magnetic field, and a strain responsive component coupled to the structural component to sense the mechanical indication and to provide an indication of the current in the current carrying conductor in response thereto.
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