公开(公告)号：US20060076947A1

公开(公告)日：2006-04-13

申请号：US11289910

申请日：2005-11-30

申请人： Ertugrul Berkcan ,  Shankar Chandrasekaran ,  Christopher Kapusta ,  Laura Meyer ,  Glenn Claydon ,  Debbie Jones ,  Anis Zribi

发明人： Ertugrul Berkcan ,  Shankar Chandrasekaran ,  Christopher Kapusta ,  Laura Meyer ,  Glenn Claydon ,  Debbie Jones ,  Anis Zribi

IPC分类号： G01R1/20

CPC分类号： G01R15/207 ,  G01R15/148 ,  G01R33/0283 ,  G01R33/0286 ,  G01R35/005 ,  Y10T29/49002

摘要： A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component a structural component comprising a silicon substrate and a compliant layer comprising a material selected from the group consisting of silicon dioxide and silicon nitride, a magnetic-to-mechanical converter coupled to the structural component to provide a mechanical indication of the magnetic field, and a strain responsive component coupled to the structural component to sense the mechanical indication and to provide an indication of the current in the current carrying conductor in response thereto.

摘要翻译： 基于微机电系统（MEMS）的电流和磁场传感器包括基于MEMS的磁场感测部件，包括硅衬底的结构部件和包括选自二氧化硅和氮化硅的材料的柔性层， 耦合到所述结构部件以提供所述磁场的机械指示的磁 - 机械转换器，以及耦合到所述结构部件以感测所述机械指示并且提供所述载流导体中的电流的指示的应变响应部件 回应。

公开(公告)号：US20070052410A1

公开(公告)日：2007-03-08

申请号：US11506493

申请日：2006-08-18

申请人： Ertugrul Berkcan ,  Christopher Kapusta ,  Glenn Claydon ,  Anis Zribi ,  Laura Meyer ,  Wei-Cheng Tian

发明人： Ertugrul Berkcan ,  Christopher Kapusta ,  Glenn Claydon ,  Anis Zribi ,  Laura Meyer ,  Wei-Cheng Tian

IPC分类号： G01R1/20

CPC分类号： G01R33/0283 ,  G01R15/148 ,  G01R33/0286

摘要： A micro-electromechanical system (MEMS) current sensor is described as including a first conductor, a magnetic field shaping component for shaping a magnetic field produced by a current in the first conductor, and a MEMS-based magnetic field sensing component including a magneto-MEMS component for sensing the shaped magnetic field and, in response thereto, providing an indication of the current in the first conductor. A method for sensing a current using MEMS is also described as including shaping a magnetic field produced with a current in a first conductor, sensing the shaped magnetic field with a MEMS-based magnetic field sensing component having a magneto-MEMS component magnetic field sensing circuit, and providing an indication of the current in the first conductor.

公开(公告)号：US20070040547A1

公开(公告)日：2007-02-22

申请号：US11506988

申请日：2006-08-18

申请人： Ertugrul Berkcan ,  Christopher Kapusta ,  Glenn Claydon ,  Anis Zribi ,  Laura Meyer ,  Wei-Cheng Tian

发明人： Ertugrul Berkcan ,  Christopher Kapusta ,  Glenn Claydon ,  Anis Zribi ,  Laura Meyer ,  Wei-Cheng Tian

IPC分类号： G01R1/20

CPC分类号： G01R33/0283 ,  G01R15/148 ,  G01R33/0286

摘要： A micro-electromechanical system (MEMS) current sensor is described as including a first conductor, a magnetic field shaping component for shaping a magnetic field produced by a current in the first conductor, and a MEMS-based magnetic field sensing component including a magneto-MEMS component for sensing the shaped magnetic field and, in response thereto, providing an indication of the current in the first conductor. A method for sensing a current using MEMS is also described as including shaping a magnetic field produced with a current in a first conductor, sensing the shaped magnetic field with a MEMS-based magnetic field sensing component having a magneto-MEMS component magnetic field sensing circuit, and providing an indication of the current in the first conductor.

摘要翻译： 微机电系统（MEMS）电流传感器被描述为包括第一导体，用于使由第一导体中的电流产生的磁场成形的磁场成形部件，以及包括磁 - 用于感测成形磁场的MEMS组件，并且响应于此，提供第一导体中的电流的指示。 还描述了一种用于感测使用MEMS的电流的方法，包括使用在第一导体中的电流产生的磁场成形，用具有磁MEMS组件磁场感测电路的基于MEMS的磁场感测组件感测成形的磁场 并且提供第一导体中的电流的指示。

公开(公告)号：US20050270014A1

公开(公告)日：2005-12-08

申请号：US11129682

申请日：2005-05-13

申请人： Anis Zribi ,  Glenn Claydon ,  Christopher Kapusta ,  Laura Meyer ,  Ertugrul Berkcan ,  Wei-Cheng Tian

发明人： Anis Zribi ,  Glenn Claydon ,  Christopher Kapusta ,  Laura Meyer ,  Ertugrul Berkcan ,  Wei-Cheng Tian

IPC分类号： G01R15/20 ,  G01R33/028 ,  G01R33/02

CPC分类号： G01R33/0283 ,  G01R15/148 ,  G01R33/0286

摘要： A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component having a capacitive magneto-MEMS component, a compensator and an output component for sensing magnetic fields and for providing, in response thereto, an indication of the current present in a respective conductor to be measured. In one embodiment, first and second mechanical sense components are electrically conductive and operate to sense a change in a capacitance between the mechanical sense components in response to a mechanical indicator from a magnetic-to-mechanical converter.

摘要翻译： 基于微机电系统（MEMS）的电流和磁场传感器包括具有电容式磁MEMS组件的基于MEMS的磁场感测部件，补偿器和用于感测磁场的输出部件，并且响应于此而提供 当前存在于待测量的导体中的指示。 在一个实施例中，第一和第二机械感测部件是导电的并且用于响应于来自磁 - 机械转换器的机械指示器感测机械感测部件之间的电容的变化。

公开(公告)号：US20050270013A1

公开(公告)日：2005-12-08

申请号：US10863442

申请日：2004-06-07

申请人： Ertugrul Berkcan ,  Christopher Kapusta ,  Glenn Claydon ,  Anis Zribi ,  Laura Meyer ,  Wei-Cheng Tian

发明人： Ertugrul Berkcan ,  Christopher Kapusta ,  Glenn Claydon ,  Anis Zribi ,  Laura Meyer ,  Wei-Cheng Tian

IPC分类号： G01R15/20 ,  G01R33/028 ,  G01R33/02

CPC分类号： G01R33/0283 ,  G01R15/148 ,  G01R33/0286

摘要： A micro-electromechanical system (MEMS) current sensor is described as including a first conductor, a magnetic field shaping component for shaping a magnetic field produced by a current in the first conductor, and a MEMS-based magnetic field sensing component including a magneto-MEMS component for sensing the shaped magnetic field and, in response thereto, providing an indication of the current in the first conductor. A method for sensing a current using MEMS is also described as including shaping a magnetic field produced with a current in a first conductor, sensing the shaped magnetic field with a MEMS-based magnetic field sensing component having a magneto-MEMS component magnetic field sensing circuit, and providing an indication of the current in the first conductor.

摘要翻译： 微机电系统（MEMS）电流传感器被描述为包括第一导体，用于使由第一导体中的电流产生的磁场成形的磁场成形部件，以及包括磁 - 用于感测成形磁场的MEMS组件，并且响应于此，提供第一导体中的电流的指示。 还描述了一种用于感测使用MEMS的电流的方法，包括使用在第一导体中的电流产生的磁场成形，用具有磁MEMS组件磁场感测电路的基于MEMS的磁场感测组件感测成形的磁场 并且提供第一导体中的电流的指示。

公开(公告)号：US20070181963A1

公开(公告)日：2007-08-09

申请号：US11736678

申请日：2007-04-18

申请人： Ertugrul Berkcan ,  Christopher Kapusta ,  Marco Aimi ,  Shankar Chandrasekaran ,  Glenn Claydon

发明人： Ertugrul Berkcan ,  Christopher Kapusta ,  Marco Aimi ,  Shankar Chandrasekaran ,  Glenn Claydon

IPC分类号： H01L29/84

CPC分类号： G01R15/207 ,  G01R15/148 ,  G01R33/0283 ,  G01R33/0286 ,  G01R35/005

摘要： A micro-electro-mechanical system (MEMS) current sensor for sensing a magnetic field produced by an electrical current flowing in a conductor includes a first fixed element and a moving element. The moving element is spaced away from the first fixed element and is movable relative to the fixed element responsive to a magnetic field produced by an electrical current flowing in a conductor for providing a mechanical indication of a strength of the magnetic field. The sensor also includes a tunneling current generator for generating a tunneling current between the first fixed element and the moving element and a tunneling current monitor for monitoring a change in the tunneling current responsive to the mechanical indication to provide an indication of a value of the electrical current in the conductor.

摘要翻译： 用于感测由在导体中流动的电流产生的磁场的微机电系统（MEMS）电流传感器包括第一固定元件和移动元件。 移动元件与第一固定元件间隔开，并且可响应于在导体中流动的电流产生的磁场相对于固定元件移动，以提供磁场强度的机械指示。 传感器还包括用于在第一固定元件和移动元件之间产生隧道电流的隧道电流发生器，以及隧道电流监视器，用于响应于机械指示监视隧道电流的变化，以提供电气值的指示 电流在导体中。

公开(公告)号：US07221144B2

公开(公告)日：2007-05-22

申请号：US11289910

申请日：2005-11-30

申请人： Ertugrul Berkcan ,  Shankar Chandrasekaran ,  Christopher James Kapusta ,  Laura Jean Meyer ,  Glenn Scott Claydon ,  Debbie Gahaton Jones ,  Anis Zribi

发明人： Ertugrul Berkcan ,  Shankar Chandrasekaran ,  Christopher James Kapusta ,  Laura Jean Meyer ,  Glenn Scott Claydon ,  Debbie Gahaton Jones ,  Anis Zribi

IPC分类号： G01R31/00

CPC分类号： G01R15/207 ,  G01R15/148 ,  G01R33/0283 ,  G01R33/0286 ,  G01R35/005 ,  Y10T29/49002

摘要： A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component a structural component comprising a silicon substrate and a compliant layer comprising a material selected from the group consisting of silicon dioxide and silicon nitride, a magnetic-to-mechanical converter coupled to the structural component to provide a mechanical indication of the magnetic field, and a strain responsive component coupled to the structural component to sense the mechanical indication and to provide an indication of the current in the current carrying conductor in response thereto.

摘要翻译： 基于微机电系统（MEMS）的电流和磁场传感器包括基于MEMS的磁场感测部件，包括硅衬底的结构部件和包括选自二氧化硅和氮化硅的材料的柔性层， 耦合到所述结构部件以提供所述磁场的机械指示的磁 - 机械转换器，以及耦合到所述结构部件以感测所述机械指示并且提供所述载流导体中的电流的指示的应变响应部件 回应。

公开(公告)号：US07508189B2

公开(公告)日：2009-03-24

申请号：US11733896

申请日：2007-04-11

申请人： Ertugrul Berkcan ,  Shankar Chandrasekaran ,  Christopher James Kapusta ,  Laura Jean Meyer ,  Glenn Scott Claydon ,  Debbie Gahaton Jones ,  Anis Zribi

发明人： Ertugrul Berkcan ,  Shankar Chandrasekaran ,  Christopher James Kapusta ,  Laura Jean Meyer ,  Glenn Scott Claydon ,  Debbie Gahaton Jones ,  Anis Zribi

IPC分类号： G01R31/00

CPC分类号： G01R15/207 ,  G01R15/148 ,  G01R33/0283 ,  G01R33/0286 ,  G01R35/005 ,  Y10T29/49002

摘要： A micro-electromechanical system current and magnetic field sensor is presented. The micro-electromechanical system current and magnetic field sensor is configured to sense a magnetic field produced by a current carrying conductor. The sensor includes a structural component comprising a substrate and a compliant layer, a magnetic-to-mechanical converter coupled to the structural component to provide a mechanical indication of the magnetic field. The sensor further includes a strain responsive component coupled to the structural component to sense the mechanical indication and to provide an indication of the current in the current carrying conductor in response thereto.

摘要翻译： 提出了一种微机电系统电流和磁场传感器。 微机电系统电流和磁场传感器被配置为感测由载流导体产生的磁场。 该传感器包括结构部件，其包括基板和柔性层，耦合到结构部件的磁 - 机械转换器，以提供磁场的机械指示。 传感器还包括耦合到结构部件的应变响应部件以感测机械指示并且响应于此而提供载流导体中的电流的指示。

公开(公告)号：US07466121B2

公开(公告)日：2008-12-16

申请号：US11506493

申请日：2006-08-18

申请人： Ertugrul Berkcan ,  Christopher James Kapusta ,  Glenn Scott Claydon ,  Anis Zribi ,  Laura Jean Meyer ,  Wei-Cheng Tian

发明人： Ertugrul Berkcan ,  Christopher James Kapusta ,  Glenn Scott Claydon ,  Anis Zribi ,  Laura Jean Meyer ,  Wei-Cheng Tian

IPC分类号： G01R33/00

CPC分类号： G01R33/0283 ,  G01R15/148 ,  G01R33/0286

摘要： A micro-electromechanical system (MEMS) current sensor is described as including a first conductor, a magnetic field shaping component for shaping a magnetic field produced by a current in the first conductor, and a MEMS-based magnetic field sensing component including a magneto-MEMS component for sensing the shaped magnetic field and, in response thereto, providing an indication of the current in the first conductor. A method for sensing a current using MEMS is also described as including shaping a magnetic field produced with a current in a first conductor, sensing the shaped magnetic field with a MEMS-based magnetic field sensing component having a magneto-MEMS component magnetic field sensing circuit, and providing an indication of the current in the first conductor.

摘要翻译： 微机电系统（MEMS）电流传感器被描述为包括第一导体，用于使由第一导体中的电流产生的磁场成形的磁场成形部件，以及包括磁 - 用于感测成形磁场的MEMS组件，并且响应于此，提供第一导体中的电流的指示。 还描述了一种用于感测使用MEMS的电流的方法，包括使用在第一导体中的电流产生的磁场成形，用具有磁MEMS组件磁场感测电路的基于MEMS的磁场感测组件感测成形的磁场 并且提供第一导体中的电流的指示。

公开(公告)号：US07315161B2

公开(公告)日：2008-01-01

申请号：US11129682

申请日：2005-05-13

申请人： Anis Zribi ,  Glenn Scott Claydon ,  Christopher James Kapusta ,  Laura Jean Meyer ,  Ertugrul Berkcan ,  Wei-Cheng Tian

发明人： Anis Zribi ,  Glenn Scott Claydon ,  Christopher James Kapusta ,  Laura Jean Meyer ,  Ertugrul Berkcan ,  Wei-Cheng Tian

IPC分类号： G01R33/00

CPC分类号： G01R33/0283 ,  G01R15/148 ,  G01R33/0286

摘要： A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component having a capacitive magneto-MEMS component, a compensator and an output component for sensing magnetic fields and for providing, in response thereto, an indication of the current present in a respective conductor to be measured. In one embodiment, first and second mechanical sense components are electrically conductive and operate to sense a change in a capacitance between the mechanical sense components in response to a mechanical indicator from a magnetic-to-mechanical converter.

摘要翻译： 基于微机电系统（MEMS）的电流和磁场传感器包括具有电容式磁MEMS组件的基于MEMS的磁场感测部件，补偿器和用于感测磁场的输出部件，并且响应于此而提供 当前存在于待测量的导体中的指示。 在一个实施例中，第一和第二机械感测部件是导电的并且用于响应于来自磁 - 机械转换器的机械指示器感测机械感测部件之间的电容的变化。